A gas discharge pre-ionization device
A technology of gas discharge and pre-ionization, which is applied to the parts, circuits, and electrical components of gas lasers. It can solve the problems of gas medium corrosion, large inductance of the discharge circuit, and large size of the pre-ionization structure, so as to prolong the service life and increase the High reliability and high discharge efficiency
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[0027] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.
[0028] Such as figure 2 with image 3 As shown, the gas discharge pre-ionization device of the present invention is divided into two parts: the inside of the laser gas chamber 8 and the outside of the laser gas chamber 8 . Among them, the laser gas chamber 8 includes several pairs of pre-ionization needles 2 and a pair of discharge electrodes; the laser gas chamber 8 includes energy storage capacitors 5 and several pairs of peaking capacitors 10; the gas medium in the laser gas chamber 8 is connected to a pair of discharge electrodes The gap between them flows through; the pre-ionization needle 2 is double-connected with the corresponding peaking capacitor 10 through the plug-in mechanism 11 to form a pre-ionization charge-discharge circuit; the discharge electrode includes an upper electrode 1 and a lower electrode 21 arranged up a...
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