Preparation method of TEM (Transmission Electron Microscope) sample
A sample and chip technology, applied in the field of shallow trench isolation structure manufacturing, can solve the problems of high difficulty, low productivity, high cost, etc., and achieve simple, cost-effective, high-efficiency, and low-cost effects
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[0034] In order to make the above objects, features and advantages of the present invention more clearly understood, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. It should be noted that the accompanying drawings of the present invention are all in a simplified form and use inaccurate scales, and are only used to facilitate and clearly assist the purpose of explaining the embodiments of the present invention.
[0035] like image 3 As shown, the present invention provides a method for preparing a TEM sample, comprising:
[0036] Step 1: As Figure 4 As shown, the chip 100 to be analyzed is provided. It should be noted that the chip 100 to be analyzed is a conventional product in the prior art, and it does not require staff to spend time on special research, and the cost is low. Further, the chip to be analyzed 100 includes a device layer 110 and a silicon substrate 120 , and the size (length×w...
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