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Electromechanical systems device with segmented electrodes

An electromechanical system, segmented electrode technology, applied in piezoelectric devices/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, circuits, etc. Stable operating range, rotational instability, etc.

Inactive Publication Date: 2015-12-09
SNAPTRACK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The rotational stability of the movable layer can affect the stable operating range of the EMS, and the rotational instability can limit the performance of the EMS device

Method used

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  • Electromechanical systems device with segmented electrodes
  • Electromechanical systems device with segmented electrodes
  • Electromechanical systems device with segmented electrodes

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Embodiment Construction

[0038] The following description refers to certain embodiments for the purpose of describing the innovative aspects of the invention. However, those of ordinary skill in the art will recognize that the teachings herein can be applied in a variety of different ways. The described embodiments may be practiced in any device, device, or system that can be configured to display images, whether moving (such as video) or stationary (such as still images), and whether textual, graphical, or pictorial . More specifically, it is contemplated that the described embodiments may be incorporated in or associated with various electronic devices such as, but not limited to: mobile phones, cellular phones with multimedia Internet capabilities, mobile television receivers, wireless devices, smartphones , devices, personal data assistants (PDAs), wireless email receivers, handheld or portable computers, netbooks, notebooks, smartbooks, tablets, printers, copiers, scanners, fax devices, GPS re...

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Abstract

This disclosure provides systems, methods and apparatus for increasing a range of stable travel positions of a movable layer within electromechanical systems (EMS) devices. In one aspect, an electrically isolated floating electrode can be disposed between a driving electrode within a movable layer and a fixed electrode in order to increase a stable travel range of the movable layer. By segmenting the electrically isolated floating electrode into multiple isolated electrode segments, unbalanced charge accumulation in response to tilting of the movable layer can be constrained to further increase the stable travel range of the movable layer.

Description

technical field [0001] The present invention relates to an electromechanical systems (EMS) device with segmented electrodes and a method of manufacturing the same. Background technique [0002] Electromechanical systems (EMS) include devices with electronic and mechanical elements, actuators, transducers, sensors, optical components such as mirrors and optical films, and electronic circuits. EMS devices or elements can be fabricated at various scales, including but not limited to microscale and nanoscale. For example, microelectromechanical systems (MEMS) devices can include structures having dimensions ranging from about one micron to hundreds of microns or more. Nanoelectromechanical systems (NEMS) devices may include structures having dimensions smaller than a micron, including dimensions such as smaller than a few hundred nanometers. Electromechanical elements can be created using deposition, etching, photolithography, and / or other micromachining processes that etch aw...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B26/00B81B3/00
CPCG02B26/001B81B3/0059B81B2201/047B81B2203/0127B81B2203/04G09G5/10
Inventor 爱德华·杰·廉·陈约翰·贤哲·洪琼·厄克·李伊萨克·克拉克·莱因斯
Owner SNAPTRACK
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