The invention discloses a micro-electro-mechanical-
system (MEMS) scanning 2mum
laser heterodyne interferometer
optics system and an adjustment method thereof. The
system comprises a 2mum
fiber optic
laser, a
fiber optic
beam splitter, a Green lens, a first lens, a second lens, a polarization beam-splitter
prism, a
lambda / 4 wave plate, an MEMS array lens, an F-Theta lens, a reflector, a
fiber optic receiving
collimator, a fiber optic beam combiner, an online
polarizer, a photoelectric
detector, an
oscilloscope, an acousto-optic
frequency shifter and an attenuator. During a debugging process, by adjusting the polarization beam-splitter
prism, the first lens, the second lens and the MEMS array lens, positions and postures of all devices are determined, and finally, a time-domain curve and a frequency-domain curve displayed by the
oscilloscope respectively correspond to external drive
signal frequencies of the acousto-optic
frequency shifter. According to the MEMS scanning 2mum
laser heterodyne interferometer
optics system and the adjustment method thereof disclosed by the invention, the problem that the laser test
signal coupling efficiency is low under different
modes of the large-
diameter MEMS scanning laser
heterodyne interferometer system is solved, and the
system stability and the detection sensitivity of the
heterodyne interferometer system are improved.