Micro-electro-mechanical-system (MEMS) scanning 2mum laser heterodyne interferometer optics system and adjustment method thereof

Abstract

The invention discloses a micro-electro-mechanical-system (MEMS) scanning 2mum laser heterodyne interferometer optics system and an adjustment method thereof. The system comprises a 2mum fiber optic laser, a fiber optic beam splitter, a Green lens, a first lens, a second lens, a polarization beam-splitter prism, a lambda / 4 wave plate, an MEMS array lens, an F-Theta lens, a reflector, a fiber optic receiving collimator, a fiber optic beam combiner, an online polarizer, a photoelectric detector, an oscilloscope, an acousto-optic frequency shifter and an attenuator. During a debugging process, by adjusting the polarization beam-splitter prism, the first lens, the second lens and the MEMS array lens, positions and postures of all devices are determined, and finally, a time-domain curve and a frequency-domain curve displayed by the oscilloscope respectively correspond to external drive signal frequencies of the acousto-optic frequency shifter. According to the MEMS scanning 2mum laser heterodyne interferometer optics system and the adjustment method thereof disclosed by the invention, the problem that the laser test signal coupling efficiency is low under different modes of the large-diameter MEMS scanning laser heterodyne interferometer system is solved, and the system stability and the detection sensitivity of the heterodyne interferometer system are improved.

Description

technical field [0001] The invention relates to a fast and reasonable heterodyne interferometer optical system and its assembly method. Background technique [0002] The traditional visible light interferometer indirectly calculates the physical quantity information of the object to be measured by measuring the change of interference fringes formed by the interaction between the reference beam and the beam to be measured. The measurement error of this method is large; secondly, it cannot accurately measure a large range of physical quantities of the object to be measured; thirdly, traditional interferometers cannot measure the internal physical properties of infrared materials. [0003] In recent years, with the rapid development of fiber laser and fiber optic industry, MEMS-based scanning 2μm laser heterodyne interferometer came into being. This system uses fiber laser as the system test light source, and uses fiber-free space as the propagation path of laser signals. Compr...

AI Technical Summary

Problems solved by technology

[0005] The technical problem solved by the present invention is: to overcome the deficiencies of the prior art, to provide a MEMS scanning 2μm laser heterodyne interferometer optical system and its assembly method, and to solve the problem of different modes of the large-aperture MEMS scanning laser heterodyne interferometer system. The problem of low coupling efficiency of laser test signals

Images