Microgyroscope batch dynamic testing method oriented to closed loop detection
A dynamic testing and closed-loop testing technology, applied in measurement devices, instruments, etc., can solve the problems of low calibration efficiency, inaccurate calibration results, and time-consuming and laborious calibration process.
Inactive Publication Date: 2015-12-23
ZHONGBEI UNIV
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[0020] In order to solve the problems of inaccurate calibration results, time-consuming and labor-intensive calibration process, and low calibration efficiency of existing silicon micromechanical gyroscope dynamic calibration methods, the present invention provides a closed-loop detection-oriented batch dynamic testing method for micro gyroscopes
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[0079] A batch dynamic testing method for micro-gyroscopes oriented to closed-loop detection, the method is realized by adopting the following steps:
[0080] 1) Each silicon micromachined gyroscope adopts a separate driving closed-loop circuit; the driving axial structure generates the driving displacement signal XV, and outputs the driving displacement signal XV to the driving closed-loop circuit; the driving closed-loop circuit generates the driving mode according to the driving displacement signal XV The excitation signal XS, and the driving mode excitation signal XS is output to the driving axial structure, so that the frequency of the driving displacement signal XV is equal to the resonant angular frequency of the driving mode, and the amplitude of the driving displacement signal XV is kept constant; the driving mode The specific generation steps of the state excitation signal XS are as follows:
[0081] The drive pre-amplification interface extracts and initially amplif...
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The invention relates to a dynamic calibration technology of silicon micromachined gyroscopes, in particular to a microgyroscope batch dynamic testing method oriented to closed loop detection. The problems that according to an existing silicon micromachined gyroscope dynamic calibration method, calibration results are inaccurate, the calibration process wastes time and labor, and the calibration efficiency is low are solved. The microgyroscope batch dynamic testing method oriented to closed loop detection is realized by adopting the following steps that each silicon micromachined gyroscope adopts an individual driving closed loop; all the silicon micromachined gyroscopes are provided with an external signal source, and each silicon micromachined gyroscope is provided with an individual closed loop Coriolis force equivalent signal generating device; each silicon micromachined gyroscope adopts an individual detection closed loop; each silicon micromachined gyroscope is provided with individual collecting equipment. The microgyroscope batch dynamic testing method is suitable for dynamic calibration of the silicon micromachined gyroscopes.
Description
technical field [0001] The invention relates to a dynamic calibration technology of a silicon micro-mechanical gyroscope, in particular to a batch dynamic testing method of a micro-gyroscope oriented to closed-loop detection. Background technique [0002] Silicon micromachined gyroscope is a sensor that uses the Coriolis effect principle to input angular rate information from a sensitive carrier. It has the advantages of small size, low power consumption, light weight, low cost, strong anti-overload characteristics, easy integration and mass production. , and are widely used in many fields (such as inertial navigation, automotive safety, industrial control, consumer electronics, etc.). Such as Figure 1-Figure 3 As shown, the silicon micromachined gyroscope working in the closed-loop detection state includes a gyro structure and a gyro measurement and control circuit. The gyro structure includes a driving axial structure and a detecting axial structure. The detection axial...
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Login to View More IPC IPC(8): G01C25/00
CPCG01C25/00
Inventor 刘俊曹慧亮石云波申冲唐军马宗敏
Owner ZHONGBEI UNIV