Touch control display device and manufacturing method thereof
A touch display device and display module technology, which is applied in the fields of instruments, electrical digital data processing, and data processing input/output processes, etc., can solve the problems of restricting the development of touch screens, thick thickness, etc.
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[0033] The method for manufacturing the touch display device includes: preparing a graphene layer by laser evaporation on the color filter substrate of the thin film transistor display module.
[0034] Preferably, the surface resistance of the color filter substrate of the thin film transistor display module is 1×10 8 ~1×10 9 Ω / cm 2 .
[0035] Preferably, the vacuum degree of the coating chamber is 10 -2 Pa~10 -3 Pa, the temperature of the coating chamber is 80 ℃ ~ 100 ℃, the helium gas flow rate is 28 sccm ~ 32 sccm, the base distance is 1150 mm, and the laser beam power density is 104 W / cm 2 ~109W / cm 2 . Base pitch refers to the distance from the crucible to the substrate. In this step, the entire TFT module is put into the laser evaporation coating equipment for sputtering.
[0036] When the vacuum pressure and temperature of the chamber do not reach the preset value, the number of graphene vapor molecules and residual gas molecules reaching the substrate is roughly...
Embodiment 1
[0048] The preparation of the graphene layer of the touch display device of embodiment 1 comprises the following steps:
[0049] (1) Use a cleaning machine to clean the TFT substrate of the TFT module with pure water, lye, BJ spray, DI spray, and high-pressure spray in sequence, clean the dirt and dust on the surface of the substrate, and dry it with cold air and hot air. Static electricity dissipates, check that the surface is free of dirt and dust, and wait for coating.
[0050] (2) Using CO 2 Laser evaporation coating machine coating, the vacuum degree of the coating chamber is 6.5*10 -2 Pa, the temperature of the coating chamber is 100°C, the helium flow rate is 30sccm, the base distance is 1150mm, and the laser beam power density is 104W / cm 2 ~109W / cm 2 , the crucible is a graphite crucible, and the evaporation material is graphene.
[0051] The thickness of the graphene layer measured by a film thickness meter is 26nm.
[0052] The color difference of the graphene l...
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