Method for producing granular polysilicon
A technology for manufacturing granules and polysilicon, applied in chemical instruments and methods, silicon, silicon compounds, etc.
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Embodiment 1
[0050] In this embodiment (such as figure 1 Schematic), exhaust gas 6 heats the two feed streams 1 and 2. For this purpose, two heat exchangers 3 and 4 are used.
[0051] h 2 The gas stream 1 is not subject to an upper temperature limit, so it is heated in the first heat exchanger 3 at a relatively high temperature level.
[0052] Then, with the help of heat exchanger 4, exhaust gas 6 converts TCS / H 2 The gas mixture (feed gas stream 2) is heated to a temperature of approximately 350°C.
[0053] Overall, 136.9kW of heat can be recovered from the method.
[0054] The exact values in heat exchangers 3,4 can be found in Table 1 and Table 2.
[0055] Table 1 shows data for heat exchanger 3 .
[0056]Table 1
[0057] Exhaust gas inlet temperature
850.00
℃
Exhaust gas outlet temperature
584.12
℃
20.00
℃
h 2 output temperature
800.00
℃
78.50
kW
ΔT log...
Embodiment 2
[0064] In this embodiment (such as figure 2 shown), exhaust gas 6 preheats feed seed 7.
[0065] Only requires a minimum heat of 1.02kW.
[0066] For example, flushing the container with the seeds 7 with the hot exhaust air 6 can transfer heat.
[0067] Table 3 shows the data for this heat exchanger.
[0068] table 3
[0069] Exhaust gas inlet temperature
Embodiment 3
[0071] This example is in image 3 in the icon. It is not the subject of this patent, but is given only in comparison with other solutions.
[0072] Product particles with a mass flow of 37.16kg / h (32.16kg / h net deposit + 5kg / h seed) 8 heating H 2 Feed gas stream 1.
[0073] It is assumed that the granular silicon 8 is cooled from 1000° C. to 900° C. via different cooled internals and on the way to the heat exchanger 3 .
[0074] In heat exchanger 3, 8.22kW of heat is transferred.
[0075] Similar to Example 2, it is conceivable to use product containers, where H is preferred 2 Flow through the hot pellets from the reactor.
[0076] Clearly, more than an order of magnitude more energy can be recovered by using exhaust heat to preheat the feedstock than in the case of waste heat recovery by pellets 8 .
[0077] Table 4 shows the data for this heat exchanger.
[0078] Table 4
[0079] h 2 Inlet temperature
PUM
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