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Methods for processing complex three-dimensional micro-nano structure in nanoscratching mode through AFM probe

A technology of micro-nano structure and probe, applied in the direction of nano-structure manufacturing, nanotechnology, nanotechnology, etc., can solve complex three-dimensional micro-nano structure and other problems, and achieve the effect of simple method, low cost of device and processing

Active Publication Date: 2016-02-24
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In order to solve the problem of processing complex three-dimensional micro-nano structures, the present invention provides a method for processing complex three-dimensional micro-nano structures by nano-scribing with AFM probes

Method used

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  • Methods for processing complex three-dimensional micro-nano structure in nanoscratching mode through AFM probe
  • Methods for processing complex three-dimensional micro-nano structure in nanoscratching mode through AFM probe

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specific Embodiment approach 1

[0021] Specific implementation mode one: as figure 1 As shown, this embodiment provides an AFM processing device for processing complex three-dimensional micro-nano structures, consisting of an AFM1 (Q-Scope250; AmbiosCompany, USA), a processed sample 2, an X-direction precision workbench 3 and a Y-direction precision workbench 4 (M511.HD; PICompany, Germany), in which: the X-direction precision table 3 and the Y-direction precision table 4 are displacement stages with millimeter scale and nanometer positioning accuracy, and the two are stacked and installed, that is: the processed sample 2 It is fixed on the slider of the precision table 3 in the X direction, the base of the precision table 3 in the X direction is fixed on the slider of the precision table 4 in the Y direction, and the slider of the X direction positioning table 3 moves in the X direction, and the Y direction The base of the precision workbench 4 is fixedly connected to the AFM1 sample stage, and the slider o...

specific Embodiment approach 2

[0022] Specific implementation mode two: as figure 2 As shown, the difference between this embodiment and the first embodiment is that the processing device may also include a two-dimensional high-precision positioning platform controller 5, a control computer 6, an AFM controller 7 and a control computer 8, and the two-dimensional high-precision positioning The platform controller 5 is connected to the X-direction precision workbench 3 and the Y-direction precision workbench 4, the control computer 6 is connected to the two-dimensional high-precision positioning platform controller 5, and the atomic force microscope 1 is connected to the AFM controller 7 and the control computer 8 in sequence.

specific Embodiment approach 3

[0023] Specific Embodiment Three: This embodiment provides a method for nano-scribing and processing nano-channels with stepped bottom structures by AFM probes. The process is as follows: first, according to the length, width, number of overlapping regions, The processing parameters such as the size of the overlapping area pre-set the scanning range and scanning frequency of the AFM probe, the processing speed and processing length of the X-direction precision table; and finally complete the processing. The specific process is as follows:

[0024] (1) The AFM system is set to the contact mode, and the diamond AFM probe gradually contacts the sample surface with a certain load so that the needle tip is pressed into the sample surface, and the load applied to the needle tip indirectly controls the processing depth.

[0025] (2) The AFM probe scans in the set area scanning range, and the AFM probe moves from the initial point to the end point to complete a scanning cycle. After ...

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Abstract

The invention discloses methods for processing a complex three-dimensional micro-nano structure in a nanoscratching mode through an AFM probe, and belongs to the field of micro-nano structure processing. In order to achieve processing of the complex three-dimensional micro-nano structure, a device comprises an AFM, an X-direction precise working table and a Y-direction precise working table. A base of the X-direction precise working table is fixedly connected to a sliding block of the Y-direction precise working table, a sliding block of the X-direction precise working table performs X-direction movement, a base of the Y-direction precise working table is fixedly connected to an AFM sample table, and the sliding block of the Y-direction precise working table performs Y-direction movement. According to the three methods, due to different control and parameter settings of one commercial AFM and one high-precision positioning platform system, the complex three-dimensional micro-nano structure is processed through the AFM probe with the nanoscratching technology. By means of the methods, the processing of the complex three-dimensional micro-nano structure can be achieved with low cost, the methods are simple, and device cost and processing achieving cost are low.

Description

[0001] This application is a divisional application with the filing date of August 07, 2014, the application number 201410385711.5, and the title of the invention "A device and method for nano-scribing and processing complex three-dimensional micro-nano structures using AFM probes". technical field [0002] The invention belongs to the field of micro-nano structure processing, and relates to a complex three-dimensional micro-nano structure processing method based on AFM probe nano-scribing processing. Background technique [0003] Complex microstructures with nanometer precision have a wide demand in many fields, such as high-density grating structures, complex three-dimensional micro-nanostructures, etc., have been widely used in binary micro-optics, X-ray astronomical telescopes, extreme ultraviolet lithography, laser inertial confinement Nuclear fusion diagnostic system, experimental mechanics, surface engineering and many other fields. For the above-mentioned structures,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B82B3/00B82Y40/00
Inventor 闫永达耿延泉于博文赵学森胡振江
Owner HARBIN INST OF TECH