Implanting method and device based on rapid moving laser focus of scanning galvanometer

Abstract

The invention discloses an implanting method based on the rapid moving laser focus of a scanning galvanometer. The implanting method includes the steps that a base material is put in turbid liquid formed by target material particles; laser is adjusted through a movable lens and then focuses through a focus lens; a laser beam is emitted to an X scanning mirror and a Y scanning mirror, and a control system is used for controlling the movement of an X galvanometer and a Y galvanometer and further controlling the reflection angles of the X scanning mirror and the Y scanning mirror; and impact waves and high-speed micro jet flow generated by induction of laser push the fine particles to be embedded in the base material in an impacting mode. The galvanometer technology is adopted, the laser focus is controlled to move according to a specified movement track and scanning speed, scanning movement is carried out on the surface, needing to be embedded with the fine particles, of the base material, the turbid liquid provides target materials needed by implanting continuously, and uniformity of a continuous micro structure is guaranteed. The laser focus of the galvanometers moves rapidly, and it is guaranteed that the surroundings of the two times of implantation are in a stable state all the time. The invention further discloses a device for implementing the method.

Description

technical field [0001] The invention relates to the technical field of surface fine structure processing and laser implantation, in particular to an implantation method and device for rapidly moving laser focus based on a scanning galvanometer. Background technique [0002] Microcircuit refers to a microelectronic device that has high-density equivalent circuit elements and (or) components and can be used as an independent piece. Micro-Electro-Mechanical System (MEMS) refers to a high-tech device with a size of a few millimeters or even smaller. Its internal structure is generally on the order of microns or even nanometers. It is an independent intelligent system, mainly composed of sensors, actuators Composed of three major parts, micro-energy has the characteristics of miniaturization, intelligence, multi-function, high integration and suitability for mass production. It has broad application prospects in electronics, medicine, industry, automotive and aerospace systems. ...

AI Technical Summary

Problems solved by technology

[0005] The time of laser action is about milliseconds. In the preparation of continuous microstructures, it is necessary to adopt the method of stacking and repeat the implantation process. The time interval of milliseconds is still relatively long, which makes the "automatic target replenishment technology" and "liquid state The processing efficiency of the “target forward transfer technology” is low, and the “automatic target replenishment technology” and the “liquid target material forward transfer technology” both use a single optical path for implantation, and there is no similar implantation scheme using galvanometers at the same time

Images