Micro-nano electrochemical deposition machining method based on liquid drop Taylor cone

A micro-nano electrochemistry and droplet technology, applied in electroforming, electrolysis process, 3D structure electroforming, etc., can solve the problems of harsh equipment operating conditions and achieve the effect of deposition processing

CN105420763AActive Publication Date: 2016-03-23CHINA UNIV OF PETROLEUM (EAST CHINA)
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2016-03-23

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Abstract

The invention relates to a micro-nano electrochemical deposition machining method based on a liquid drop Taylor cone, and belongs to the technical field of micro-nano manufacturing. The method comprises the steps that liquid drops containing deposited metal ions are firstly put between a metal probe and a workpiece, and the materials of the probe are deposited materials; the probe and the workpiece are both immersed in an insulating medium, and the insulating medium and water are not compatible; the probe and the workpiece are connected with the positive pole and the negative pole of a direct-current power source respectively; the liquid drops do reciprocating motion between the probe and the workpiece under the action of an electric field; and when the liquid drops are close to the probe and the workpiece, the Taylor cone is formed on the surfaces of the liquid drops under the action of the electric field, by means of the electrochemical action generated during contact of the liquid drop Taylor cone, the probe and the workpiece, metal atoms of the metal probe are changed into metal cations to enter the liquid drops, then the metal cations are carried by the liquid drops to the surface of the workpiece and conveyed to the surface of the workpiece through the liquid drop Taylor cone, the metal cations obtain electrons on the surface of the workpiece to be changed into atoms to be deposited, and therefore micro-nano electrochemical deposition machining is achieved.
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Description

technical field

[0001] The invention belongs to the technical field of micro-nano manufacturing, and relates to a micro-nano electrochemical deposition processing method based on a droplet Taylor cone. Background technique

[0002] The in-depth development of nanotechnology puts forward higher and higher requirements for nanomanufacturing technology. Traditional nano-manufacturing technology can be divided into mask processing technology and maskless processing technology. LIGA (Lithographie, Galanoformung and Abformung) is a typical mask processing technology, which is a microfabrication technology based on electrochemical and photolithography technology. The processing accuracy of mask processing technology depends to a large extent on the accuracy of photolithography. The current lithography technologies mainly include excimer lithography, extreme ultraviolet lithography, electron beam lithography, ion beam exposure, X-ray lithography and nanoimprint lithography. [00...

Examples

Embodiment Construction

[0013] see figure 1 . The invented micro-nano electrochemical deposition processing method based on the droplet Taylor cone is to first place the droplet containing metal ions between the metal probe and the workpiece; both the metal probe and the workpiece are immersed in the insulating medium, and the insulating medium Incompatible with water; the probe and the workpiece are respectively connected to the positive and negative poles of the DC power supply, and an electric field is formed between the metal probe and the workpiece; the droplet reciprocates between the probe and the workpiece under the action of the electric field; When it is close to the probe and the workpiece, the surface of the droplet forms a Taylor cone under the action of the electric field, and the metal atoms of the metal probe are changed into metal cations into the liquid by using the electrochemical action of the Taylor cone of the droplet in contact with the metal probe and the workpiece. Then the ...