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Moving magnetic steel gas-magnetism combined air-suspension double-workpiece-stage vector circular-arc exchange method and device based on double-layer water cooling

A double-workpiece table, double-layer water-cooling technology, which is applied to the exposure device of the photo-engraving process, the photo-engraving process of the pattern surface, optics, etc. The problems such as the increase of the host structure of the lithography machine have achieved the effect of reducing the difficulty of control and implementation, shortening the time for changing the stage, and reducing the temperature

Inactive Publication Date: 2016-03-23
HARBIN INST OF TECH
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Problems solved by technology

However, the transposition of the workpiece table by rotating the entire base has problems such as large moment of inertia, difficulty in precise positioning of high-power rotary motors, and high heat generation that cause system temperature rise. At the same time, the radius of gyration is large, which significantly increases the structure of the main body of the lithography machine.
Chinese patent CN102495528 adopts a rotary transfer table in the center of the abutment to complete the exchange of double workpiece tables. The table change is divided into three beats, which improves the efficiency of the table change. However, the structure of the rotary transfer table is complicated and the rotary positioning accuracy is low.

Method used

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  • Moving magnetic steel gas-magnetism combined air-suspension double-workpiece-stage vector circular-arc exchange method and device based on double-layer water cooling
  • Moving magnetic steel gas-magnetism combined air-suspension double-workpiece-stage vector circular-arc exchange method and device based on double-layer water cooling
  • Moving magnetic steel gas-magnetism combined air-suspension double-workpiece-stage vector circular-arc exchange method and device based on double-layer water cooling

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Embodiment Construction

[0028] Below in conjunction with accompanying drawing, embodiment of the present invention is described in further detail:

[0029] A method for changing stages based on double-layer water-cooled moving magnetic steel gas-magnetism combined with air-flotation double workpiece stage vector arc, the method includes the following steps: in the initial working state, the first workpiece stage at the measurement position is in a pre-aligned state, and the first workpiece stage at the exposure position is in a pre-aligned state. The second workpiece table is in the exposure state; the first step, after the pre-alignment of the first workpiece table at the measurement position, it is driven by the moving magnetic steel to move to the predetermined position A of the measurement position and change the table and wait, and the second workpiece table at the exposure position is exposed. The magnetic steel drive moves to the predetermined position B of the exposure position; in the second ...

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Abstract

The invention provides a moving magnetic steel gas-magnetism combined air-suspension double-workpiece-stage vector circular-arc exchange method and device based on double-layer water cooling and belongs to a semiconductor manufacturing equipment technology. The device comprises a supporting frame, a balance mass block, gas-magnetism combined air-suspension workpiece stages, workpiece stage measurement devices, workpiece stage driving devices and sensor signal transmission devices, wherein the two workpiece stages work between a measurement position and an exposure position, the positions of the workpiece stages are measured by adopting a plane grating, coil arrays are cooled by adopting a double-layer water cooling structure, the workpiece stages are driven by adopting air suspension and planar motors, and the planar motors are adopted to drive the two workpiece stages to achieve quick single-beat arc stage exchange in the double-workpiece-stage exchange process. The problems of large beat number, long trajectories, multiple start-stop links, long stabilization time and the like of an existing stage exchange scheme are solved, stage exchange links are decreased, the stage exchange time is shortened, and the productive rate of a photo-etching machine is improved.

Description

technical field [0001] The invention belongs to the technical field of semiconductor manufacturing equipment, and mainly relates to a method and a device for a vector arc return conversion table based on double-layer water-cooled moving magnetic steel gas-magnetism combined with air-flotation double workpiece tables. Background technique [0002] Lithography machine is one of the important ultra-precision equipment in the manufacture of very large scale integrated circuits. As the key subsystem of the lithography machine, the workpiece table largely determines the resolution, overlay accuracy and productivity of the lithography machine. [0003] Productivity is one of the main goals of lithography machine development. Under the condition of satisfying the resolution and overlay accuracy, improving the operating efficiency of the workpiece table and thus improving the productivity of the lithography machine is the development direction of the workpiece table technology. The...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20
CPCG03F7/70733G03F7/70716
Inventor 谭久彬杨远源王雷
Owner HARBIN INST OF TECH
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