Moving magnetic steel gas-magnetism combined air-suspension double-workpiece-stage vector circular-arc exchange method and device based on double-layer water cooling
A double-workpiece table, double-layer water-cooling technology, which is applied to the exposure device of the photo-engraving process, the photo-engraving process of the pattern surface, optics, etc. The problems such as the increase of the host structure of the lithography machine have achieved the effect of reducing the difficulty of control and implementation, shortening the time for changing the stage, and reducing the temperature
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[0028] Below in conjunction with accompanying drawing, embodiment of the present invention is described in further detail:
[0029] A method for changing stages based on double-layer water-cooled moving magnetic steel gas-magnetism combined with air-flotation double workpiece stage vector arc, the method includes the following steps: in the initial working state, the first workpiece stage at the measurement position is in a pre-aligned state, and the first workpiece stage at the exposure position is in a pre-aligned state. The second workpiece table is in the exposure state; the first step, after the pre-alignment of the first workpiece table at the measurement position, it is driven by the moving magnetic steel to move to the predetermined position A of the measurement position and change the table and wait, and the second workpiece table at the exposure position is exposed. The magnetic steel drive moves to the predetermined position B of the exposure position; in the second ...
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