Cu-doped indium sulfide film preparation method
An indium sulfide and thin film technology, which is applied in semiconductor/solid-state device manufacturing, photovoltaic power generation, electrical components, etc., can solve the problems of unfavorable thin-film solar cell conversion efficiency, high thin-film resistivity, and reduced resistivity, so as to reduce the thin-film resistivity. , high purity, easy and uniform doping effect
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Publication Date
- 2016-03-23
- Estimated Expiration
- Not applicable · inactive patent
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Abstract
Description
technical field
[0001] The invention belongs to the technical field of material preparation, and in particular relates to a method for preparing a Cu-doped indium sulfide film. Background technique
[0002] General copper zinc tin sulfur (Cu 2 ZnSnS 4 , referred to as CZTS) thin-film solar cell structure is: medium / bottom electrode / absorbing layer (CZTS) / buffer layer / transparent conductive layer / top electrode, where the buffer layer is mainly used to reduce the gap between the transparent conductive layer and the absorbing layer. For continuous phenomena, materials with high light transmittance and resistivity in the range of 5.0~120Ω?cm are generally used. Current solar cells mainly use CdS as a buffer layer, but CdS is a toxic material and is not suitable for sustainable development, so it is necessary to develop a non-toxic and environmentally friendly material to replace it. Indium sulfide (In 2 S 3 ) is a non-toxic semiconductor material with a band gap of 2.0~3.7e...
Examples
Embodiment 1
[0039] A method for preparing a Cu-doped indium sulfide film, which specifically comprises the following steps:
[0040] Step 1): Clean the transparent glass sheet, that is, ultrasonically treat the glass sheet in deionized water, acetone, and ethanol for 15 minutes, then take it out, and dry it in a high-temperature drying oven at 100°C for 30 minutes;
[0041] Step 2): Place the dried glass sheet obtained in step 1) on the sample holder of the vacuum evaporation furnace, and then put it into the evaporation chamber; put 150mg of indium sulfide powder in the evaporation boat, and then put it into the evaporation chamber; Vacuum the evaporation chamber to 1.0×10 -3After Pa, slowly apply current at a rate of 10A / min to heat the evaporation boat. When the current reaches about 90A, the indium sulfide powder on the evaporation boat begins to evaporate onto the glass sheet, and continue to slowly apply current until the sulfide in the evaporation boat After the indium powder evap...
Embodiment 2
[0047] A method for preparing a Cu-doped indium sulfide film, which specifically comprises the following steps:
[0048] Step 1): Clean the transparent glass sheet, that is, ultrasonically treat the glass sheet in deionized water, acetone, and ethanol for 15 minutes, then take it out, and dry it in a high-temperature drying oven at 100°C for 30 minutes;
[0049] Step 2): Place the dried glass sheet obtained in step 1) on the sample holder of the vacuum evaporation furnace, and then put it into the evaporation chamber; put 150mg of indium sulfide powder in the evaporation boat, and then put it into the evaporation chamber; Vacuum the evaporation chamber to 1.0×10 -3 After Pa, slowly apply current at a rate of 10A / min to heat the evaporation boat. When the current reaches about 90A, the indium sulfide powder on the evaporation boat begins to evaporate onto the glass sheet, and continue to slowly apply current until the sulfide in the evaporation boat After the indium powder eva...
Embodiment 3
[0055] A method for preparing a Cu-doped indium sulfide film, which specifically comprises the following steps:
[0056] Step 1): Clean the transparent glass sheet, that is, ultrasonically treat the glass sheet in deionized water, acetone, and ethanol for 15 minutes, then take it out, and dry it in a high-temperature drying oven at 100°C for 30 minutes;
[0057] Step 2): Place the dried glass sheet obtained in step 1) on the sample holder of the vacuum evaporation furnace, and then put it into the evaporation chamber; put 300mg of indium sulfide powder in the evaporation boat, and then put it into the evaporation chamber; Vacuum the evaporation chamber to 1.0×10 -3 After Pa, slowly apply current at a rate of 10A / min to heat the evaporation boat. When the current reaches about 90A, the indium sulfide powder on the evaporation boat begins to evaporate onto the glass sheet, and continue to slowly apply current until the sulfide in the evaporation boat After the indium powder eva...