Self-testing and self-calibrating system of infrared thermopile temperature sensor

Abstract

The invention discloses a self-testing and self-calibrating system of an infrared thermopile temperature sensor, and realizes the self-testing and self-calibrating function of the infrared thermopile temperature sensor under the effect of on-chip electric excitation. The system is characterized in that the on-chip excitation is conducted to realize the signal amplification, the analog-to-digital/ digital-to-analog conversion and the digital processing for the output signal of a thermopile while the electric excitation is provided for the infrared thermopile temperature sensor at the same time based on the conventional MEMS process. Therefore, the self-testing and self-calibrating function for the on-chip response ratio of the infrared thermopile temperature sensor can be realized. Meanwhile, the influence of the external environment on the response ratio of the infrared thermopile temperature sensor is optimized. The testing and calibrating cost caused by adopting off-chip high-precision equipment is reduced.

Description

technical field [0001] The invention relates to a self-test and self-calibration system for an infrared thermopile temperature sensor, which can be applied to the internal circuit design of an infrared thermopile temperature sensing system. Background technique [0002] For all objects in nature, as long as its temperature is higher than the absolute temperature (-273°C), there will be irregular movement of molecules and atoms, and its surface will continuously emit infrared radiation. In addition, the infrared radiation power released by objects at different temperatures is different, so by detecting the infrared radiation power emitted by the object, the detector unit can obtain the temperature of the object. Infrared detectors can convert incident radiation signals into electrical signal output devices, transforming many thermal images that were originally imperceptible to the human eye into other physical quantities that can be detected and measured, thus deepening the u...

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Problems solved by technology

[0004] However, on the one hand, the parameter values ​​of MEMS devices may change due to changes in environmental variables (temperature and pressure) and manufacturing process variables. At the same time, the sensitivity of MEMS sensor equipment is a parameter that has a greater impact with changes in ambient temperature. Therefore, the current MEMS chips Large-scale calibration equipment must be used for factory calibration before it is used in the corresponding field, resulting in high calibration costs; on the other hand, with the development of MEMS technology, highly integrated circuits are widely used. , it is also necessary to measure the input and output of excitation such as sound, light, vibration, fluid, pressure, temperature or chemical, so testing these circuits is becoming more and more difficult, and the cost of testing is also high

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