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Adjustment mechanism for optics support

A technology of optical components and adjustment mechanisms, applied in the direction of optical components, optics, installation, etc., can solve problems such as limited stroke range, and achieve the effect of large light-passing part, good vacuum compatibility, and compact structure

Active Publication Date: 2017-12-26
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0005] The present invention provides an adjustment mechanism for optical element support in order to solve the limited stroke range of the existing optical element eccentric adjustment method and better solve the technical problem of thermal stress relief

Method used

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  • Adjustment mechanism for optics support
  • Adjustment mechanism for optics support

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specific Embodiment approach 1

[0016] Specific implementation mode 1. Combination figure 1 and figure 2 To illustrate this embodiment, the main body of the adjustment mechanism 6 is connected to the support structure 10 of the optical element 2 through three flexible sheets 3 , and the optical element 2 is connected to the support structure 10 through the elastic compression ring 1 . The three flexible sheets 3 are evenly distributed along the tangential direction of the optical element 2 .

[0017] In this embodiment, the three flexible sheets 3 are respectively connected to the three flexible hinges 5 on the main body 6 of the adjustment mechanism. Three degrees of freedom of motion in the tangential direction. The flexible hinge 5 adds a symmetrically arranged first elastic sheet 5-1 and a second elastic sheet 5-2 between the two sheets on the basis of the traditional flexible hinge. The structure is as follows: figure 2 As shown, it greatly increases the stiffness of the support adjustment mechanis...

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Abstract

An adjustment mechanism for optical element support relates to the technical field of precision adjustment of optical elements, in particular to an adjustment mechanism for optical element support; this mechanism solves the limited travel range of the existing optical element eccentric adjustment method and better solves the problem of heat The technical problem of stress relief; the adjustment amount of the optical element is used as the input of the motion control, and the movement amount of the three actuators is calculated through the control software, and then an instruction is sent to trigger the actuator to start driving the flexible sheet, and the three actuators drive During the process of three flexible sheets, three displacement sensors are used for position feedback to realize closed-loop control of motion, so as to achieve precise eccentric position adjustment of optical components; this mechanism adopts an integrated structure, which avoids internal stress and The eccentricity and inclination caused by the secondary assembly greatly reduce the deformation caused by thermal stress.

Description

technical field [0001] The invention relates to the technical field of precise adjustment of optical elements, in particular to an adjustment mechanism for optical element support. Background technique [0002] When the optical system is integrated, in order to obtain a system with the best performance, it is required that all optical components must have a high degree of coaxiality to ensure that the center of each optical component is on a common optical axis. Therefore, for a single optical It is necessary to configure an eccentric adjustment mechanism with high resolution and high stability for the components. [0003] The eccentric adjustment of optical components usually adopts a mechanical adjustment structure, and the thermal expansion coefficient of the adjustment mechanism is inconsistent with that of the components, which will cause the mirror body to deform when subjected to thermal stress impact, thus affecting the system wave difference of the optical system. T...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B7/00
CPCG02B7/00G02B7/008
Inventor 周烽王辉郭本银谢耀王丽萍
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI