Terminal Protection Structure for Superjunction Devices
A terminal protection structure and superjunction device technology, applied in semiconductor devices, electrical components, circuits, etc., can solve the problems of process realization difficulty, poor leakage characteristics, device leakage difference, etc., to improve reliability and improve the distribution of electric field strength , reduce the effect of movable ions
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[0055] Embodiment 1 of the present invention super junction device:
[0056] Such as figure 2 As shown, it is a top view of a super-junction device in an embodiment of the present invention; in the terminal protection structure of a super-junction device in an embodiment of the present invention, the super-junction device includes a charge flow region and a terminal protection structure, and the middle region of the super-junction device is a charge flow region , the terminal protection structure surrounds the periphery of the charge flow area, the terminal protection structure includes a transition area and a voltage bearing area, the transition area is located between the charge flow area and the voltage bearing area, figure 2 Zone 1 represents the charge flow zone, Zone 2 denotes the transition zone, and Zone 3 denotes the voltage bearing zone.
[0057] The current flow region includes a first partial super junction structure composed of alternately arranged first P-type...
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