Detection board for radiation analysis and its manufacturing method
A detection board and detection element technology, which is applied in the field of detection boards to achieve the effect of simple manufacturing
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[0051] figure 1 A detection element is shown, which is formed by a depression of the carrier plate 11 , in which a cavity 16 is formed in conjunction with the protective film 10 . Ionization takes place in the inner chamber 16 by means of ionizing radiation. The depression is substantially conical, so that the two electrodes, anode 12 and cathode 13 , essentially form sections of the sides of the cone and are each realized by an electrically conductive coating designed as a metallization. Both the anode 12 and the cathode 13 are separated by an unmetallized strip, which is delimited by a first high voltage distance D1. The first high-voltage distance D1 is selected in dependence on the operating voltage of the detection element.
[0052] The opening 14 is arranged on the anode side and has vias which are electrically conductively connected on the one hand to the anode 12 and on the other hand to a contact region 25 arranged outside the interior space 16 . Due to the arrange...
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