Three-degree-of-freedom displacement measurement system for air bearing table based on two planar gratings

A technology of planar gratings and measurement systems, which is applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of long measuring optical path, error sensitivity, and large volume, and achieve high thrust density, good dynamic characteristics, and high measurement accuracy. Effect

Active Publication Date: 2018-01-12
HARBIN INST OF TECH
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  • Application Information

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Problems solved by technology

In the traditional scheme, because the laser interferometer has the advantages of sensitive measurement and high resolution, the displacement measurement of the ultra-precision air bearing table is completed by the laser interferometer, but there are also errors caused by air and humidity due to the long measurement optical path Very sensitive, and the disadvantages of large size and high cost

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  • Three-degree-of-freedom displacement measurement system for air bearing table based on two planar gratings
  • Three-degree-of-freedom displacement measurement system for air bearing table based on two planar gratings
  • Three-degree-of-freedom displacement measurement system for air bearing table based on two planar gratings

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Embodiment Construction

[0021] Below in conjunction with accompanying drawing, embodiment of the present invention is described in further detail:

[0022] A three-degree-of-freedom displacement measurement system for an air bearing table based on two plane gratings, the system includes a base 1, an air bearing table 2, a first workpiece table 4a, and a second workpiece table 4b. The floating support is located above the base 1, the macro-moving planar motor stator 3 is installed on the plane on the air bearing table 2, the first workpiece table 4a and the second workpiece table 4b are arranged above the macro-moving planar motor stator 3, and the first The workpiece table 4a and the second workpiece table 4b run between the measurement position 11 and the exposure position 12. The measurement position 11 is located on the left side of the base 1, and the exposure position 12 is located on the right side of the base 1. The system includes two sets of flat gratings Measuring system 5, said planar grat...

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Abstract

The invention discloses an air bearing table three-DOF (Degree Of Freedom) displacement measurement system based on two plane gratings. The air bearing table three-DOF displacement measurement system comprises a base, an air bearing table, two magnetic suspension workpiece tables and a workpiece table driving device, wherein the two magnetic suspension workpiece tables work between a measurement position and an exposure position; the two plane gratings which are diagonally and symmetrically arranged are adopted for measuring the position of the air bearing table, and the magnetic suspension workpiece tables are driven by adopting a magnetic suspension planar motor. The air bearing table three-DOF displacement measurement system disclosed by the invention has the advantages that the difficult problem of displacement measurement of an existing air bearing table is solved, precise measurement of the air bearing table can be realized, and the air bearing table is guided to return to zero during a workpiece table initialization process.

Description

technical field [0001] The invention belongs to the technical field of semiconductor manufacturing equipment, and mainly relates to a three-degree-of-freedom displacement measurement system for an air bearing table based on two plane gratings. Background technique [0002] Lithography machine is one of the important ultra-precision equipment in the manufacture of very large scale integrated circuits. As the key subsystem of the lithography machine, the workpiece table largely determines the resolution, overlay accuracy and productivity of the lithography machine. [0003] Productivity is one of the main goals of lithography machine development. Under the condition of satisfying the resolution and overlay accuracy, improving the operating efficiency of the workpiece table and thus improving the productivity of the lithography machine is the development direction of the workpiece table technology. The most direct way to improve the operating efficiency of the workpiece table...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/02
CPCG01B11/02
Inventor 刘永猛谭久彬
Owner HARBIN INST OF TECH
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