High-order resonance type quartz tuning fork micro-cantilever and manufacturing method thereof

Abstract

The invention relates to a high-order resonance type quartz tuning fork micro-cantilever and a manufacturing method thereof. The high-order resonance type quartz tuning fork micro-cantilever comprises a quartz tuning fork body. The quartz tuning fork body comprises a tuning fork basal part, a vibration arm and a fixed arm. The vibration arm and the fixed arm are connected with the tuning fork basal part. The thickness of the vibration arm is smaller than the thickness of the fixed arm by d mm. The sum of the thickness of the vibration arm, the thickness of the fixed arm and the gap between the vibration arm and the fixed arm is equal to the thickness of the quartz tuning fork body. In this way, the high-order eigen frequency of the high-order resonance type quartz tuning fork micro-cantilever is an integer multiple of the base frequency, wherein d is larger than 0 and smaller than the thickness of the fixed arm. According to the technical scheme of the invention, the coupling of the oscillation frequency in the high-order eigen mode with the base frequency is tuned. Therefore, more frequency signals, besides base-frequency signals, can be detected. Moreover, the sensitivity and the resolution are higher. As a result, the force non-linear detection between a needle point and a sample and more physical properties of the sample can be realized.

Description

technical field [0001] The invention relates to the field of atomic force microscopy, in particular to a high-order resonance type quartz tuning fork micro-cantilever and a manufacturing method thereof. Background technique [0002] Continuous improvements in spatial resolution, data acquisition speed, and imaging of material properties have long been the goals of atomic force microscopy. The multi-frequency atomic force microscopy (Multi-frequency AFM, MF-AFM) developed in recent years is to excite and / or detect the vibration signal of the micro-cantilever probe at multiple frequencies to achieve sample characterization, etc. These vibration frequencies are usually related to High harmonic vibration or multiple eigenmodes of the cantilever. [0003] At present, the quartz tuning fork microcantilever has many incomparable advantages compared with the traditional silicon microcantilever: (1) The elastic constant k value of the quartz tuning fork is very large, and the distan...

AI Technical Summary

Problems solved by technology

[0005] Traditional atomic force microscopy only excites and detects at the fundamental mode frequency of the microcantilever, and the frequencies outside the fundamental frequency are usually higher and the signal intensity is smaller than the fundamental frequency part, so they are all ignored, resulting in mutual interference in other frequency parts. The force information is also lost

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