A kind of laser etching processing method of quartz crystal

A technology of quartz crystal and laser etching, which is applied in laser welding equipment, metal processing equipment, manufacturing tools, etc., can solve the problems of poor dimensional accuracy, difficult to achieve productization, easy to break, etc., achieve neat and accurate edges, and eliminate negative Influence, the effect of weakening the negative influence
CN105522281BActive Publication Date: 2018-04-03BEIJING INST OF RADIO METROLOGY & MEASUREMENT
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
BEIJING INST OF RADIO METROLOGY & MEASUREMENT
Publication Date
2018-04-03

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Abstract

The invention discloses a laser ablation processing method for quartz crystal. The laser ablation processing method specifically comprises the steps of selecting lasers, preparing control software, designing processing drawings, carrying out laser ablation, carrying out post-processing treatment and carrying out detection. The method for processing the quartz crystal is designed on the basis of limitation to the condition of each step, the quartz crystal can be effectively processed for forming various shapes and can be thinned through the processing method, the thickness of the thinned quartz crystal is small, the corresponding base frequency is high, and the strength of the processed quartz crystal is high. In addition, the processing method is simple, the processing accuracy is high, and the processing dimensional accuracy of the quartz crystal can be controlled to be within the range of + / - 5 micrometers.
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Description

technical field

[0001] The invention relates to the field of quartz crystal processing. More specifically, it relates to a laser etching processing method for quartz crystal. Background technique

[0002] Quartz crystal materials, especially α-quartz, can be made into components such as quartz crystal resonators, quartz crystal oscillators, and quartz crystal filters because of their piezoelectric effect characteristics, and are widely used in electronic products. With the development of high-frequency and functional electronic products, the processing requirements for high fundamental frequency crystal slices and special-shaped crystal slices are becoming more and more urgent. The hardness of quartz crystal is Mohs hardness 7, high hardness, brittle and easy to break, it is a typical hard and brittle material. Different from isotropic quartz glass (also known as: fused silica) material, quartz crystal has anisotropy, thermal expansion coefficient, thermal conductivity, el...

Claims

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