A cleaning agent used for removing a wafer glass mask packaging adhesive, preparation thereof and applications of the cleaning agent
A technology of cleaning agent and mask, applied in the direction of cleaning method using liquid, preparation of detergent mixture composition, detergent compounding agent, etc., to achieve the effect of less corrosion, low cost of use, and accelerated degumming speed
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Embodiment 1
[0036] Take 25kg of acetone, 10kg of ethylene glycol ether, 20kg of dodecene, 20kg of ethylenediamine, 0.1kg of dodecylbenzenesulfonic acid, 24.9kg of purified water, stir at room temperature for 30min, and mix them into a 100kg wafer glass mask plate package Glue cleaner.
[0037] Under the condition of 60° C., use the encapsulation glue cleaning agent with the above composition to soak the wafer glass mask for 4 hours, so that the residual glue is dissolved with the assistance of the organic solvent component.
Embodiment 2
[0039] Take 20kg of acetone, 15kg of ethylene glycol ether, 15kg of dodecene, 25kg of ethylenediamine, 0.1kg of dodecylbenzenesulfonic acid, 24.9kg of purified water, stir at room temperature for 30min, and mix them into a 100kg wafer glass mask plate package Glue cleaner.
[0040] Under the condition of 70°C, soak the wafer glass mask for 4 hours with the encapsulation glue cleaning agent of the above composition, so that the residual glue is dissolved with the assistance of the organic solvent component.
Embodiment 3
[0042] Take 20kg of acetone, 10kg of ethylene glycol ether, 25kg of dodecene, 25kg of ethylenediamine, 0.1kg of dodecylbenzenesulfonic acid, 19.9kg of purified water, stir at room temperature for 30min, and mix them into a 100kg wafer glass mask plate package Glue cleaner.
[0043] Under the condition of 60°C, soak the wafer glass mask for 4 hours with the encapsulation cleaning agent of the above composition, so that the residual glue is dissolved with the assistance of the organic solvent component.
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