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Gas inlet equipment for chemical vapor deposition reactor of fluidized bed

A technology of chemical vapor deposition and gas inlet, which is applied in the direction of gaseous chemical plating, metal material coating process, coating, etc., and can solve the problems that cannot be completely removed, deposition products are difficult to completely remove, and affect the process, etc.

Active Publication Date: 2016-05-11
TSINGHUA UNIV
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  • Claims
  • Application Information

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Problems solved by technology

After the reaction is over, a large amount of deposition products are attached to the gas inlet, and the deposition products are difficult to completely remove, which directly affects the process of the next deposition reaction;
[0006] (3) If the deposition product at the gas inlet cannot be completely removed, a new pipe needs to be replaced in the next deposition reaction
Specifically, the single-hole metal pipe of the gas inlet system needs to be removed, and replacement is very difficult and expensive

Method used

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  • Gas inlet equipment for chemical vapor deposition reactor of fluidized bed
  • Gas inlet equipment for chemical vapor deposition reactor of fluidized bed
  • Gas inlet equipment for chemical vapor deposition reactor of fluidized bed

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Embodiment Construction

[0037] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0038] figure 1 is a schematic cross-sectional view of a gas inlet device according to an embodiment of the present invention. Such as figure 1 As shown, the gas inlet device of an embodiment of the present invention includes: a middle gas pipeline, one end of which is arranged in the reactor, and is used to pass the gas to be cracked into the reactor; The circulating water jacket 1 is used to cool the middle gas pipeline, wherein the middle gas pipeline pas...

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Abstract

The embodiment of the invention discloses gas inlet equipment for a chemical vapor deposition reactor of a fluidized bed. The gas inlet equipment comprises a graphite porous gas inlet, a mid-way gas pipeline and a main body internal circulation water sleeve; one end of the mid-way gas pipeline is arranged in the reactor, and used for leading gas to be subject to splitting decomposition into the reactor; and the main body internal circulation water sleeve is used for cooling the mid-way gas pipeline, and the mid-way gas pipeline passes through the main body internal circulation water sleeve in a crossing manner. According to the equipment, the mid-way gas pipeline is sufficiently cooled, the temperature of gas to be subject to splitting decomposition is lower than the splitting decomposition temperature, and therefore deposition production on the wall of the mid-way gas pipeline can be basically removed, and deposition production on an inlet of the gas to be subject to splitting decomposition is also reduced; and the equipment can be suitable for long-time and stable running of the chemical vapor deposition reactor of the fluidized bed under the high-temperature condition.

Description

technical field [0001] The invention relates to the field of gas inlet design, in particular to a gas inlet device for a fluidized bed chemical vapor deposition reactor. Background technique [0002] The ceramic fuel element used in my country's pebble bed high temperature gas-cooled reactor has a structure of spherical coated particles (TRISO), and is dispersed in the graphite matrix of the fuel zone. The first guarantee for the inherent safety of the high-temperature gas-cooled reactor nuclear power plant is that the nuclear fuel used is TRISO-type coated particles with a diameter of about 0.92mm, which consists of a nuclear fuel core, a loose pyrolytic carbon layer, and an inner dense pyrolytic carbon layer. , SiC layer and outer dense pyrolytic carbon layer. The nuclear fuel particles with a four-layer composite structure are coated and prepared in a fluidized bed by chemical vapor deposition. Among them, the most critical layer is the silicon carbide layer, which play...

Claims

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Application Information

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IPC IPC(8): C23C16/442C23C16/455C23C16/32
CPCC23C16/32C23C16/4417C23C16/442C23C16/45561
Inventor 刘马林刘荣正邵友林常家兴刘兵唐亚平张秉忠杨冰朱钧国
Owner TSINGHUA UNIV