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Ultra-high resolution temperature sensor based on external liquid capsule and fixed wavelength

A temperature sensor, fixed wavelength technology, applied in the field of ultra-high sensitivity temperature sensor, can solve the problem of low sensitivity or low resolution, and achieve the effect of high resolution, small size and easy integration

Active Publication Date: 2021-04-30
SHENZHEN NUOAN ENVIRONMENTAL & SAFETY INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Although these surface plasmon temperature sensors are small, they do not have high sensitivity or resolution

Method used

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  • Ultra-high resolution temperature sensor based on external liquid capsule and fixed wavelength
  • Ultra-high resolution temperature sensor based on external liquid capsule and fixed wavelength
  • Ultra-high resolution temperature sensor based on external liquid capsule and fixed wavelength

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Embodiment Construction

[0027] The present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments.

[0028] like figure 1 As shown, the high-resolution temperature sensor of the present invention consists of an external liquid bag 1, a metal block 2, a vertical waveguide 3, a horizontal waveguide 5, two metal films 4, 6 (not etched metal films) and a Horizontally propagating signal light 200 (surface plasmons are formed on the surface of the waveguide); the signal light adopts a fixed wavelength; the liquid capsule 1 is connected to the vertical waveguide 3, the liquid capsule 1 is spherical, and its radius R is 0.1 mm. The material in is low specific heat capacity, and is the material of high coefficient of thermal expansion; The material of described high coefficient of thermal expansion adopts alcohol or mercury, preferably adopts alcohol; Metal adopts gold or silver, is preferably silver, metal film thickness (hereinafter referred to as ...

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Abstract

The invention discloses an ultra-high resolution temperature sensor based on an external liquid bag and a fixed wavelength, which consists of an external liquid bag, a metal block, a vertical waveguide, a horizontal waveguide, two metal films and a horizontal transmission The signal light is composed of; the liquid capsule is connected to the vertical waveguide, and the metal block is arranged in the vertical waveguide and can move; the vertical waveguide is connected to the horizontal waveguide; the signal light adopts a fixed wavelength. The invention has the advantages of compact structure, small volume, easy integration, high resolution, and the average temperature resolution reaches 0.99×10 ‑9 °C, the highest resolution is 0.595×10 ‑9 ℃.

Description

technical field [0001] The invention relates to a temperature sensor with ultra-high resolution and nanoscale, in particular to an ultra-high-sensitivity temperature sensor based on external liquid capsules and single-wavelength laser detection. Background technique [0002] Temperature sensors are one of the most widely used sensors in practical applications. From cold and heat meters in our lives, thermometers to large instruments and temperature control equipment on integrated circuits, temperature sensors are everywhere. Although traditional temperature sensors such as RTDs, platinum resistance thermometers, and bimetallic switches have their own advantages, they are no longer suitable for miniature and high-precision products. The advantages of semiconductor temperature sensors such as high sensitivity or resolution, small size, low power consumption, and strong anti-interference ability make them widely used in semiconductor integrated circuits. [0003] Waveguides ba...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01K11/00
CPCG01K11/006G01K5/14G01K11/00
Inventor 欧阳征标陈治良
Owner SHENZHEN NUOAN ENVIRONMENTAL & SAFETY INC
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