Metallic film flexible strain sensor and preparation method therefor

A strain sensor, metal thin film technology, applied in instruments, electric/magnetic solid deformation measurement, measurement devices, etc., can solve problems such as increased cost, loss of high-sensitivity characteristics, complex device structure, etc., to facilitate large-scale production, raw materials The effect of rich source and simple preparation process

Active Publication Date: 2016-06-01
TSINGHUA UNIV
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Problems solved by technology

At present, highly sensitive strain sensors usually include two configurations: one is to use a material with a large intrinsic piezoresistive coefficient as a sensitive material to construct a strain sensor, but limited by the type and characteristics of the material, this strain sensor has certain limitations. defects, or lack of flexibility, or can only work at the micro scale, while the macro scale loses

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  • Metallic film flexible strain sensor and preparation method therefor
  • Metallic film flexible strain sensor and preparation method therefor
  • Metallic film flexible strain sensor and preparation method therefor

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Embodiment Construction

[0031] The specific structure, working principle and working process of the present invention will be further described below in conjunction with the accompanying drawings.

[0032] The present invention provides a metal film flexible strain sensor, which includes a metal film 1 , a flexible base material 2 , at least two contact electrodes 3 and lead wires 4 .

[0033] The composition of the metal film is a polycrystalline film, and the metal film contains through directional long cracks 11, such as figure 1 shown. In particular, at the directional long crack 11, the direction of the crack is perpendicular to the stretching direction, the crack penetrates from one side of the device to the other side of the device, and the width of the crack is only at the nanoscale or even smaller, that is, the initial state of the crack may be closed However, along the thickness direction, cracks penetrate the metal film and may even extend into the flexible substrate. Therefore, although...

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Abstract

The invention discloses a metallic film flexible strain sensor and a preparation method therefor. The sensor comprises a metallic film, a flexible base material, and at least two contacts. The metallic film is attached to the flexible base material in a weak attaching manner. The metallic film is provided with at least one through directional long crack, wherein the width of the directional long crack is at a nanometer scale. The directional long crack passes through the metallic film to the interior of the flexible base material in a thickness direction, and the direction of the directional long crack is perpendicular to a stretching direction. When the metallic film generates stretching deformation along with the flexible base material, the crack of the metallic film is extended and even broken. When the stretching deformation of the flexible base material is released, the crack of the metallic film narrows and finally returns to an initial state. The sensor is simple in structure, is higher in sensitivity, is simple in preparation technology, is abundant in raw material, is compatible with a conventional integrated circuit, and is convenient for large-scale production.

Description

technical field [0001] The invention relates to a sensing element and a preparation method thereof, in particular to a flexible strain sensor and the preparation thereof, and belongs to the field of material and measurement science and technology. Background technique [0002] In the field of sensing technology, those skilled in the art have developed various sensing systems for deformation and vibration. The traditional strain gauge sensing element has a simple structure, but its sensitivity coefficient is low, which makes it difficult to meet the needs of measuring weak deformation signals. The piezoresistive strain sensing element has a complex structure and is relatively expensive, which cannot meet the needs of low-cost and large-scale applications. [0003] Therefore, it is necessary to provide a sensor device with a simple structure and a high resistance strain sensitivity coefficient, which can effectively sense weak deformations, vibrations, etc., and is convenient...

Claims

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Application Information

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IPC IPC(8): G01B7/16G01H11/06
CPCG01B7/18G01H11/06
Inventor 朱宏伟杨婷婷
Owner TSINGHUA UNIV
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