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Miniature two-dimensional scanning mirror

A two-dimensional scanning mirror and miniature technology, applied in the field of scanning mirrors, can solve the problems of difficulty in widespread use, high price, low yield, etc., and achieve the effects of being conducive to large-scale mass production, simple overall structure, and easy to miniaturize

Inactive Publication Date: 2016-06-29
SUZHOU INST OF BIOMEDICAL ENG & TECH CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, silicon-based MEMS vibrating mirrors are complex to manufacture, expensive, low yield, and short lifespan, making it difficult to be widely used in commercial products

Method used

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  • Miniature two-dimensional scanning mirror
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  • Miniature two-dimensional scanning mirror

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] Such as figure 1 As shown, this case lists a miniature two-dimensional scanning mirror of an embodiment, which includes:

[0025] Bracket 1, which is surrounded by metal strips to form a frame, and has two side arms 6;

[0026] The reflector 2 is suspended in the frame by two symmetrically distributed elastic arms 3, one end of the elastic arm 3 is connected to the reflector 2, and the other end is connected to the side arm 6 of the bracket 1;

[0027] The piezoelectric sheet 4, which is arranged on the side arm 6 of the support 1, is used to generate an inverse piezoelectric effect under the action of an electric field, thereby driving the reflection sheet 2 to rotate. After the piezoelectric sheet 4 is energized, an inverse piezoelectric effect is generated, which drives the bracket 1 to generate bending vibration, thereby stimulating the twisting or bending of the elastic arm 3, and driving the reflective sheet 2 to deflect at a certain angle. When the vibration fr...

Embodiment 2

[0031] Such as Figure 4 As shown, on the basis of Embodiment 1, at least two piezoelectric sheets 4 are provided, and they are respectively located on the two side arms 6 of the support 1; four sheets can also be provided, that is, as Figure 4 In the piezoelectric sheet 4a, piezoelectric sheet 4b, piezoelectric sheet 4c and piezoelectric sheet 4d.

[0032] In this embodiment, when the number of piezoelectric sheets 4 is two, the two piezoelectric sheets 4 can be located on the same side of the plane where the support 1 is located (such as piezoelectric sheet 4a and piezoelectric sheet 4d, or piezoelectric sheet 4b and piezoelectric sheet 4c) or on both sides of the plane where the support 1 is located (such as piezoelectric sheet 4a and piezoelectric sheet 4c, or piezoelectric sheet 4b and piezoelectric sheet 4d). When the number of piezoelectric sheets 4 is two, there are three working modes: working mode 1: After applying the driving signal, the piezoelectric sheet is for...

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Abstract

The invention relates to a miniature two-dimensional scanning mirror, which comprises a bracket, a reflecting plate and a piezoelectric plate, wherein a frame body is enclosed by metal strips; the bracket comprises two side arms; the reflecting plate is suspended in the frame by two symmetrically distributed elastic arms; one end of each elastic arm is connected with the reflecting plate and the other end is connected to the side arms of the bracket; and the piezoelectric plate is arranged on the side arms of the bracket and is used for generating an inverse piezoelectric effect under the action of an electric field, so that the reflecting plate is driven to rotate. According to the miniature two-dimensional scanning mirror, the problems that one-dimensional and two-dimensional scanning mirrors are low in scanning frequency, complicated in structure and large in processing difficulty are solved; the overall structure is simple; two-dimensional deflecting scanning of a reflector is achieved under the conditions of one drive source and single piezoelectric plate; microminiaturization is easy to achieve; the cost is low; processing of a substrate can be finished by the metal substrate and a laser plate etching process; and large-batch production is facilitated.

Description

technical field [0001] The invention relates to a scanning mirror, in particular to a miniature two-dimensional scanning mirror. Background technique [0002] Scanning mirrors are key components in many optical systems such as laser scanning microscopes, laser scanning displays, laser printers, and barcode readers. They usually require one-dimensional or two-dimensional scanning capabilities to meet certain scanning angles, scanning frequencies, and scanning resolutions. rate requirements. At the same time, according to the application, the driving voltage, volume and weight, structural stability, process compatibility, production cost and service life, etc. need to be considered. [0003] At present, laser scanning technology is mostly galvanometer-type vibrating mirror technology. Many commercial scanning microscope systems adopt this scheme. The scanning frequency is lower than 500Hz, and the partial scanning speed is slow. The acousto-optic diffraction technology cont...

Claims

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Application Information

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IPC IPC(8): G02B26/08
CPCG02B26/0858
Inventor 马玉婷钟金凤严心涛吴云良陈忠祥裴智果王策
Owner SUZHOU INST OF BIOMEDICAL ENG & TECH CHINESE ACADEMY OF SCI
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