Gas precise dispensing device

Abstract

The invention discloses an accurate gas sub-packaging device. The accurate gas sub-packaging device comprises vacuum pumping equipment, a container I, a container II, a container III, a gas container, a pressure gauge and a sub-packaging container, which are parallel to one another and are communicated with a main pipeline, wherein check valves are arranged between the equipment and the main pipelines and between the equipment and the main pipelines. According to actual needed sub-packaging amounts of novel gas materials, the containers with different volumes are selected and are connected in parallel, so that needed pressure in the device is in an easily controlled range; the device can be subjected to vacuum treatment through a vacuum interface and the mixing possibility of impurities is reduced; pressure data is needed in a sub-packaging process, so that the pressure of the device can be monitored through a pressure detection hole; a volume error in an actual sub-packaging process can be reduced through precise calibration of volumes, so that the sub-packaging amounts are more accurate; the high-vacuum pumping equipment can further reduce the mixing amount of the impurities in the sub-packaging process; and the pressure gauge with the precision higher than 0.2% can reduce a pressure error in the actual sub-packaging process, so that the sub-packaging amount is more accurate.

Description

technical field [0001] The invention belongs to a gas dispensing device, in particular to a gas precise dispensing device. Background technique [0002] At present, there are two types of common packaging devices at home and abroad: flow control devices and pressure control devices. The flow control device refers to the connection of flow control equipment at the entrance of the dispensing device, and controls the gas flow and inflow time according to the quality of the dispensing gas to achieve the purpose of dispensing gas; the pressure control device refers to specifying the new gas container The volume of the required gas is calculated, and the pressure of the bottle mouth of the container is controlled externally to achieve the purpose of distributing the gas. During the gas distribution process of the flow control device, the flow rate fluctuates greatly at the beginning and end stages. At this time, the flow calculation error of the flow control device is relatively ...

AI Technical Summary

Problems solved by technology

During the gas distribution process of the flow control device, the flow rate fluctuates greatly at the beginning and end stages. At this time, the flow calculation error of the flow control device is relatively large. The amount is not accurate enough; the pressure control device generally requires a high pressure at the mouth of the container during the gas dispensing process. In order to ensure the pressure at the mouth of the container, a lot of new gas materials are required outside. There are large reserves of gaseous new materials

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