A super-resolution array virtual structured light illumination imaging device and its imaging method

Abstract

The invention relates to an imaging device and method, in particular to a super-resolution array virtual structure light lighting imaging device and method, and aims to solve the problem that microscopic imaging technology can only measure thin biological samples, thereby being low in measuring efficiency in the prior art.The device comprises an LED light source 1, a collimating beam expander 2, a scanning system 3, a micro lens array 4, a collimating lens 5, a beam splitting prism 7, a one-fourth wave plate 9, a lighting object lens 10, a sample 11, a collection lens 6 and a CCD (charge coupled device) detector 8.Detection light spots obtained by scanning of each time are directly stacked on the mirror surface to obtain primary detection data, scanning different in phase lighting is performed in each direction, and super-resolution images are obtained through image reconstruction.The super-resolution array virtual structure light lighting imaging device and method expands spatial frequency domain bandwidth and is suitable for the measuring field of industrial shape and thick biological sample imaging.

Description

Technical field [0001] The invention relates to an imaging device and an imaging method thereof, in particular to a super-resolution array virtual structured light illumination imaging device and an imaging method thereof, and belongs to the technical field of optical compact measurement. Background technique [0002] Optical microscopy is a long-standing and very important non-destructive technology, which is widely used in the fields of biology and material science. Structured Illumination Microscopy (SIM) was proposed by American scientist Gustafsson in 2000. Its principle is similar to the Moiré fringe principle. By modulating the illumination function of a wide-field microscope, the light intensity transfer function (OTF) of the entire optical system is achieved. The translation and superposition are obtained, so that the system frequency domain bandwidth is increased, and the cutoff frequency is increased. Usually a sinusoidal grating is used to change the illumination int...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to solve the problem that the microscopic imaging technology in the prior art can only measure thinner biological samples. When measuring thicker samples, as the incident distance increases, the diffracted light incident by parallel light is significantly affected by the scattering effect , the problem of low measurement efficiency

Images