A super-resolution array virtual structured light illumination imaging device and its imaging method

An imaging device and virtual structure technology, applied in measuring devices, analyzing materials, and analyzing materials through optical means, can solve problems such as low measurement efficiency, achieve high measurement efficiency, increase spatial cut-off frequency, and broaden spatial frequency domain bandwidth Effect

Active Publication Date: 2019-03-19
HARBIN INST OF TECH
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Problems solved by technology

[0004] The purpose of the present invention is to solve the problem that the microscopic imaging technology in the prior art can only measure thinner biological samples. When measuring thicker samples, as the incident distance increases, the diffracted light incident by parallel light is significantly affected by the scattering effect , the problem of low measurement efficiency

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  • A super-resolution array virtual structured light illumination imaging device and its imaging method
  • A super-resolution array virtual structured light illumination imaging device and its imaging method
  • A super-resolution array virtual structured light illumination imaging device and its imaging method

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Embodiment Construction

[0041] The specific embodiments of the present invention will be described with reference to the drawings. A super-resolution array virtual structured light illumination imaging device of the present invention includes an LED light source 1, and a collimating beam expander 2, a scanning system 3, and a scanning system 3 are sequentially placed along the light propagation direction of the LED light source 1. Micro lens array 4, collimating lens 5, beam splitting prism 7, 1 / 4 wave plate 9, illumination objective lens 10, sample 11, collecting lens 6 and CCD detector 8, and the distance between the centers of adjacent illumination spots is the space period of the illumination light field An integer multiple of.

[0042] The LED light source is an incoherent light source, the illumination of the sample is incoherent illumination, and the entire imaging process is incoherent imaging.

[0043] The scanning system 3 includes a scanning galvanometer, which changes the beam deflection angle...

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Abstract

The invention relates to an imaging device and method, in particular to a super-resolution array virtual structure light lighting imaging device and method, and aims to solve the problem that microscopic imaging technology can only measure thin biological samples, thereby being low in measuring efficiency in the prior art.The device comprises an LED light source 1, a collimating beam expander 2, a scanning system 3, a micro lens array 4, a collimating lens 5, a beam splitting prism 7, a one-fourth wave plate 9, a lighting object lens 10, a sample 11, a collection lens 6 and a CCD (charge coupled device) detector 8.Detection light spots obtained by scanning of each time are directly stacked on the mirror surface to obtain primary detection data, scanning different in phase lighting is performed in each direction, and super-resolution images are obtained through image reconstruction.The super-resolution array virtual structure light lighting imaging device and method expands spatial frequency domain bandwidth and is suitable for the measuring field of industrial shape and thick biological sample imaging.

Description

Technical field [0001] The invention relates to an imaging device and an imaging method thereof, in particular to a super-resolution array virtual structured light illumination imaging device and an imaging method thereof, and belongs to the technical field of optical compact measurement. Background technique [0002] Optical microscopy is a long-standing and very important non-destructive technology, which is widely used in the fields of biology and material science. Structured Illumination Microscopy (SIM) was proposed by American scientist Gustafsson in 2000. Its principle is similar to the Moiré fringe principle. By modulating the illumination function of a wide-field microscope, the light intensity transfer function (OTF) of the entire optical system is achieved. The translation and superposition are obtained, so that the system frequency domain bandwidth is increased, and the cutoff frequency is increased. Usually a sinusoidal grating is used to change the illumination int...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/01
CPCG01N21/01
Inventor 张甦王宝凯邹丽敏谭久彬
Owner HARBIN INST OF TECH
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