Flexible radio frequency strain adjustable passive low pass filter, and manufacturing and measuring method thereof

Abstract

A flexible radio frequency strain adjustable passive low pass filter, and a manufacturing and measuring method thereof are disclosed. An upper end surface of a substrate is provided with a spiral inductance center electrode and a MIM capacitance bottom layer metal pole plate respectively. The MIM capacitance bottom layer metal pole plate is successively provided with a MIM capacitance dielectric layer and a MIM capacitance upper layer metal pole plate from bottom to top. The substrate is provided with a SU_8 insulating layer, a spiral inductance through hole, an upper layer metal pole plate through hole and a lower player metal pole plate through hole. An upper end surface of the SU_8 insulating layer is provided with a spiral inductance output terminal, a MIM capacitance input terminal, a MIM capacitance output terminal, a ground wire, a filter output terminal, a spiral inductance input terminal and a filter input terminal respectively. In the invention, through using changes of a capacitance value and an inductance value of a flexible capacitance and an inductor under a bending strain, a cut-off frequency and an S parameter of a passive filter are changed. The structure is simple, tuning is simple too, a tuning range is narrow and sensitivity is high, tuning cost is saved and there are few parasitic effects.

Description

technical field [0001] The invention relates to a low-pass filter. In particular, it relates to a flexible radio-frequency strain-adjustable passive low-pass filter and a manufacturing and measuring method for adjusting the filtering frequency through the strain of a flexible device. Background technique [0002] With the continuous development of flexible electronics, the operating frequency of flexible devices and circuits is getting higher and higher, reaching the radio frequency level. Various low-frequency interference signals are increasing, which requires a low-pass filter to separate useful signals and interference signals, and select and filter out signals of specific frequencies. [0003] At present, in the field of radio frequency devices and integrated circuits, tunable passive low-pass filters are mainly composed of variable capacitors. This adjustable passive filter has disadvantages such as relatively complicated structure and large parasitic effect. The ME...

AI Technical Summary

Problems solved by technology

This adjustable passive filter has the disadvantages of complex structure and large parasitic effect.

The MEMS tunable filter has been greatly developed at this stage due to its high quality coefficient and easy integration, but it still has not got rid of the shortcomings of complex structure and many parasitic effects.

Therefore, the existing main adjustable low-pass passive filters have relatively poor anti-interference ability and sensitivity

However, there is no applicable adjustable filter in the field of flexible radio frequency integrated circuits. Patent CN203811124U proposes a flexible radio frequency strain sensor designed by changing the S parameter of the transistor under different strains.

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