Wide-range high-precision high dynamic response eddy current displacement sensor and implementation method

A technology of a displacement sensor and a realization method, which is applied in the direction of instruments, measuring devices, and electric devices, etc., which can solve the problems of small output signal range, low anti-interference, and low sensitivity of inductance probes, so as to improve frequency response performance and reduce Good sampling rate and stability

Active Publication Date: 2016-07-20
INST OF INTELLIGENT MFG GUANGDONG ACAD OF SCI
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Problems solved by technology

[0003] At present, the linear range of the eddy current displacement sensor is only half of the probe diameter; within the measurement range, the output signal of the inductance probe has a small variation range and low sensit

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  • Wide-range high-precision high dynamic response eddy current displacement sensor and implementation method
  • Wide-range high-precision high dynamic response eddy current displacement sensor and implementation method
  • Wide-range high-precision high dynamic response eddy current displacement sensor and implementation method

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Embodiment Construction

[0031] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the embodiments and accompanying drawings.

[0032] like figure 1 As shown, the structure of the large-range, high-precision and high-dynamic-response eddy-current displacement sensor includes: AC resonant booster bridge, amplitude stabilization circuit, amplitude compensation and addition circuit, quadrature sampling trigger signal generation circuit and high-speed sampling processor; described

[0033] The AC resonant step-up bridge is composed of a resonator, a resistor R2 connected in parallel with the resonator, and a capacitor C1 and a resistor R1 connected in series with the resonator; the resonator is composed of an inductance probe Lx and two series capacitors C2 and C3;

[0034] The amplitude stabilization circuit is composed of a variable gain amplifier 4, a synchronous detection ...

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Abstract

The invention discloses a wide-range high-precision high dynamic response eddy current displacement sensor and an implementation method. The sensor comprises an AC resonance boosting bridge, a fixed amplitude circuit, an amplitude compensating and adding circuit, an orthogonal sampling trigger signal generation circuit and a high speed sampling processor. The method comprises following steps: performing dual-path data sampling through a dual-path sampling method and calculating loss resistance of the resonance circuit according to the dual-path sampling data (S1, S2); calculating coil displacement according to the circuit loss; calculating displacement temperature drift after temperature compensation according to temperature S3. According to the invention, the sensitivity and measurement range of the sensor are increased by coil boosting, fixed amplitude excitation, and amplitude compensating; external disturbance is reduced and dynamic response and stability are increased by orthogonal sampling and digital processing.

Description

technical field [0001] The invention relates to a large-scale, high-precision, high-dynamic-response eddy current displacement sensor, which is widely used in displacement and vibration measurement, and is also suitable for production line state monitoring. Background technique [0002] The basic principle of this type of sensor is that when the coil emitting the alternating electromagnetic field is close to the metal, there will be an eddy current effect. The closer the distance between the coil and the metal surface, the greater the loss. When other factors remain unchanged, the distance between the sensor and the metal surface can be measured by measuring the loss. [0003] At present, the linear range of the eddy current displacement sensor is only half of the probe diameter; within the measurement range, the output signal of the inductance probe has a small variation range and low sensitivity; the absolute value detection of the diode is adopted, and the anti-interferen...

Claims

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Application Information

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IPC IPC(8): G01B7/02
CPCG01B7/023
Inventor 李昌周松斌韩威刘忆森黄可嘉刘伟鑫
Owner INST OF INTELLIGENT MFG GUANGDONG ACAD OF SCI
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