Apparatus for manufacturing polysilicon
A technology of polysilicon and shielding, applied in the direction of hydrogenated silicon, silicon compounds, chemical/physical/physicochemical fixed reactors, etc., can solve the problems of poor insulation properties, heat loss, etc., to reduce maintenance costs and omit cleaning operations Effect
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[0034] The present invention will be described more fully hereinafter with reference to the accompanying drawings, in which exemplary embodiments of the invention are shown. As those skilled in the art would realize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention.
[0035] figure 1 is a sectional view of an apparatus for manufacturing polysilicon according to a first exemplary embodiment of the present invention, figure 2 yes figure 1 An enlarged partial view of the apparatus used to manufacture polysilicon is shown.
[0036] refer to figure 1 with figure 2 , the apparatus 100 for manufacturing polysilicon 100 is constructed of a chemical vapor deposition (CVD) reactor provided with heatable silicon filaments. Specifically, the apparatus 100 for manufacturing polysilicon includes a reaction chamber 10 , at least one pair of electrodes 20 , at least one pair of filaments 30 and ...
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