Recovery method of sapphire polishing waste liquid

A recycling method and sapphire technology, applied in grinding/polishing equipment, metal processing equipment, manufacturing tools, etc., can solve the problems of high price, lack of mature and efficient recycling methods for diamond polishing liquid, and high price of artificial diamond materials. Achieve the effect of saving materials, reducing impact and reducing costs

Active Publication Date: 2016-08-17
FUJIAN JING AN OPTOELECTRONICS CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The Mohs hardness of sapphire reaches 9.6H. During the processing, diamond wire cutting and diamond liquid are used for hard polishing. The price of artificial diamond ma

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  • Recovery method of sapphire polishing waste liquid

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Embodiment

[0023] See attached figure 1 , the recovery method of a kind of sapphire polishing waste liquid that the present invention provides, polishing waste liquid comprises diamond particles, resin copper shavings, sapphire shavings, dispersant, because in the polishing process, copper plate wears out faster, causes the resin in polishing waste liquid Copper shavings and metal copper shavings account for a higher proportion than other components, and they also have a certain recovery value. Based on the differences in the characteristics of the components contained in the polishing waste liquid, the processes of vibrating screening, chemical separation, and electroplating separation are used respectively. For example, include the steps:

[0024] S1 collects the waste slurry, and adds water equivalent to more than 3 times of the waste slurry, and the multiple used in this embodiment is 4;

[0025] S2 Ultrasonic dispersion of waste slurry particles is carried out by ultrasonic waves w...

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Abstract

The invention discloses a recovery method of sapphire polishing waste liquid. The waste liquid contains copper scraps for polishing a copper disc and diamond in polishing liquid and is recovered in combination with vibrating screen separation and chemical separation methods, an electroplating method and other methods; the copper and the diamond in the waste liquid are extracted, so that the production cost is favorably reduced.

Description

technical field [0001] The invention relates to semiconductor polishing, in particular to a method for recovering polishing waste liquid. Background technique [0002] High-purity sapphire material has long been the mirror material of high-end watches because of its high hardness and high penetration rate; it has also been widely used in LED wafers / substrates since 2000, such as 2-inch, 4-inch, and 6-inch It is used as a substrate for MOCVD machine epitaxial growth (Epitaxial Process); since Apple released the Iphone 5 in 2012, it has also successively adopted sapphire materials as cameras, home buttons, etc., and has more opportunities to be used as materials for mobile phone screens. very broad. The Mohs hardness of sapphire reaches 9.6H. During the processing, diamond wire cutting and diamond liquid are used for hard polishing. The price of artificial diamond materials remains high, and the price of diamond polishing liquid for hard polishing is high. At present, diamond...

Claims

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Application Information

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IPC IPC(8): B24B57/00
CPCB24B57/00Y02P70/10
Inventor 谢斌晖林武庆赖柏帆陈凤英
Owner FUJIAN JING AN OPTOELECTRONICS CO LTD
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