Mobile Sulfur Hexafluoride and Carbon Tetrafluoride Mixed Gas Rapid Recovery Gas Supply Device
A technology of mixing gas and sulfur hexafluoride, which can be used in chemical instruments and methods, installation devices for container construction, gas/liquid distribution and storage, etc. and other problems to achieve the effect of making up for the lack of accuracy and efficiency, and simple separation
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[0022] Such as figure 1 As shown, the mobile sulfur hexafluoride and carbon tetrafluoride mixed gas rapid recovery gas supply device of the present invention includes a mixed gas recovery system, a mixed gas separation system, a refrigeration unit 16, a special pressure charging system for sulfur hexafluoride, four Fluorocarbon-specific pressure filling system, mixed gas distribution and filling system and vacuum system, the gas outlet of the mixed gas recovery system is connected to the inlet of the mixed gas separation system, the gas outlet of the mixed gas separation system is connected to the carbon tetrafluoride special The air inlet of the pressure charging system is connected, the liquid outlet of the mixed gas separation system is connected with the liquid inlet of the special pressure charging system for sulfur hexafluoride, and the pumping port of the vacuum system is respectively connected with the mixed gas recovery system and the special sulfur hexafluoride The p...
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