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A low-temperature nano-hydrophobic vacuum discharge deposition coating method

A vacuum discharge and nano technology, applied in gaseous chemical plating, metal material coating process, coating and other directions, can solve the problems of performance degradation, becoming crispy and brittle, etc.

Active Publication Date: 2018-05-29
郑亮
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

If the glass is kept at around 150°C for a period of time, its performance will drop significantly, and it will become crisp and brittle

Method used

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  • A low-temperature nano-hydrophobic vacuum discharge deposition coating method
  • A low-temperature nano-hydrophobic vacuum discharge deposition coating method

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0048] The process of film coating of the present invention is realized by following process and step:

[0049] 1) Surface treatment steps:

[0050] 1a) Place the sample 3 to be coated on the sample stage 6 in the vacuum chamber body 5, and place the shielding net 9 at a height of 30-70mm above the sample 3, close the hatch and start the vacuum pump group 7 to vacuum until the vacuum display System 8 shows 40Pa;

[0051] 1b) Open O 2 (Oxygen, the supply pressure of the gas source should be 2-5kg / cm 2 ) solenoid valve 22 into oxygen, O 2 (oxygen) adjust the flow rate of mass flow meter 23 to be set to 5 sccm;

[0052] 1c) Pass O 2 Finally, the degree of vacuum will drop. After the degree of vacuum returns to 40Pa and becomes stable again, turn on the radio frequency power switch 13 and start the 13.56MHz radio frequency power source 12, and the power is set to 60W.

[0053] 1d) After 3 minutes, after the ion surface treatment is completed, turn off the O 2 Oxygen solenoi...

Embodiment 2

[0063] After test optimization and exploration, it is found that under the condition of other conditions unchanged, the power setting relationship of the two power sources is different when the coating film is formed. The hydrophobic ability of the film will have a significant difference. Angle, the larger the value, the stronger the hydrophobic ability) to measure. The relationship between the power matching and the hydrophobic angle of the film is shown in Table 1. Finally, it is obtained that the optimized power configuration is 120W for the 13.56MHz radio frequency power supply 12, and 40W for the 300MHz high frequency power supply 11.

[0064] Table 1 WCA(°)

[0065]

[0066] P1 is 13.56MHz RF power supply

[0067] P2 is 300MHz high-frequency power supply.

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Abstract

The invention relates to a low-temperature nano hydrophobic vacuum discharge deposition film coating method. The low-temperature nano hydrophobic vacuum discharge deposition film coating method comprises the following steps of 1, surface treatment, and 2, nano hydrophobic film coating. The invention further relates to equipment used for film coating. The equipment is provided with a vacuum bin body. The vacuum bin body is internally provided with a sample platform, a heating device, a vacuum device, a high frequency and radio frequency electrode and at least five air inlets. A shielding steel net is arranged in the position 30-70 mm above the sample platform. At least five gas sources are further arranged outside the vacuum bin body. Each gas source is provided with an adjusting device used for adjusting flow.

Description

technical field [0001] The invention relates to a surface treatment method, in particular to a surface coating method and equipment. Background technique [0002] At present, in daily life and industrial production, the surface of many materials needs to be protected to prevent water, oil or other dirt pollution, and at the same time avoid causing other damage such as: electrical short circuit caused by water, corrosion caused by chemical substances or bacteria , Virus invasion and so on. In addition, such needs exist in all aspects of consumer electronics such as clothing, shoes and hats, mobile phones, military surfaces or equipment, precious cultural relics, mirrors, and glass. [0003] While protecting the surface of the material, most applications do not want the original physical and chemical properties of the material to be changed, such as the air permeability, roughness, softness, color, gloss, tensile strength, Bending ability, etc., surface transparency, color, ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/509
CPCC23C16/5093
Inventor 郑亮
Owner 郑亮