Hybrid electro-optic annular modulator of Si-PLZT heterojunction structure based on SOI

Abstract

The invention discloses a hybrid electro-optic annular modulator of a Si-PLZT heterojunction structure based on an SOI. The hybrid electro-optic annular modulator comprises a silicon rectangular panel straight waveguide and a silicon rectangular panel annular waveguide, wherein the silicon rectangular panel straight waveguide and the silicon rectangular panel annular waveguide are coupled, the silicon rectangular panel straight waveguide is used as a direct-connection end of the hybrid electro-optic annular modulator, and the silicon rectangular panel annular waveguide is used as a resonant ring of the hybrid electro-optic annular modulator; the silicon rectangular panel straight waveguide and the silicon rectangular panel annular waveguide are completely wrapped by a PLZT rectangular channel to form a Si-PLZT hybrid structure; the inner side and the outer side of the annular waveguide part are provided with a pair of semi-wrapped curved coplanar traveling wave electrode couples, and the hybrid electro-optic annular modulator is electrified to be modulated by virtue of the curved coplanar traveling wave electrode couples, so that a refractive index of a PLZT rectangular channel is changed. The hybrid electro-optic annular modulator has the characteristics of high modulation sensitivity, small device size, good reliability, large modulation bandwidth and the like.

Description

technical field [0001] The invention relates to a hybrid electro-optical ring modulator based on SOI Si-PLZT heterojunction structure, belonging to the integration and optical communication technology of silicon-based heterojunction electro-optic modulators. Background technique [0002] With the development of optical network communication, people hope to improve the working characteristics of devices by improving optical communication technology, and reduce the corresponding process difficulty and production cost. As the core device of optical communication technology, the development of optical waveguide modulators tends to be miniaturized, low power consumption, low insertion loss, and fast response. On the other hand, the all-optical network that is being established and perfected urgently needs stable integrated optical waveguide devices with multiple functions. Taking these factors into consideration, the waveguide ring modulator is one of the best solutions at prese...

AI Technical Summary

Problems solved by technology

However, the overall size of the dielectric waveguide ring modulator commonly used at present is relatively large, the electrode structure is complicated, and the working stability is poor.

Especially polymer and SiO2 waveguide ring modulators based on thermo-optic properties have obvious shortcomings such as slow response rate and high power consumption.

Therefore, the application of this type of waveguide ring modulator in optical communication networks is greatly limited.

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