The invention discloses a
photonic crystal micro-ring modulator
chip based on a
lithium niobate film. The
photonic crystal micro-ring modulator
chip comprises a
chip substrate, a chip lower cladding layer, a
waveguide core layer and a chip upper cladding layer. According to the invention, an input optical
waveguide, a
photonic crystal micro-
ring modulation structure and an output optical waveguideare integrated on a
waveguide core layer, wherein the photonic
crystal micro-
ring modulation structure is composed of a single straight-through waveguide and a closed annular waveguide, the straight-through waveguide is of a two-dimensional line defect photonic
crystal waveguide structure, the annular waveguide is of a two-dimensional circular lattice annular
resonant cavity type photonic crystalwaveguide structure, a modulation
electrode is arranged on the annular waveguide, the waveguide core layer is made of a
lithium niobate
film material, the device size can be greatly reduced and the integration degree can be improved while the high electro-
optical coefficient is achieved, the electro-optical effect is enhanced in combination with the photonic
crystal waveguide
slow light effect, the modulator works at a low driving
voltage, and the structural size is further reduced. The modulator chip is simple in manufacturing process and easy to integrate and expand, and has good reliability and performance stability.