The invention provides a micro-ring modulator and a multi-channel micro-
ring modulation system, and belongs to the technical field of semiconductors. The micro-ring modulator comprises a
silicon waveguide structure, the
silicon waveguide structure comprises a flat plate layer and a Z-shaped
ridge waveguide which are arranged in a stacked mode, the Z-shaped
ridge waveguide and an area located under the Z-shaped
ridge waveguide form an interface area, the interface area is provided with a PN junction interface, and the PN junction interface is connected with the flat plate layer. The PN junction interface comprises a first vertical interface, a horizontal interface and a second vertical interface which are connected in sequence, and a P region and an N region are arranged on the two sides of the PN junction interface respectively; the P region and the N region are sequentially provided with a lightly doped region, a medium doped region and a heavily doped region in the width direction, the
doping concentration of the lightly doped region, the
doping concentration of the medium doped region and the
doping concentration of the heavily doped region are sequentially increased, the lightly doped region of the P region and the lightly doped region of the N region are in
butt joint, and the PN junction interface is formed at the
butt joint position. According to the micro-ring modulator provided by the invention, relatively high
modulation efficiency and relatively large bandwidth can be ensured at the same time.