X-ray diffraction analyzer and analyzing method

Abstract

The X-ray diffraction analyzer (1) according to an embodiment of the present invention is provided with: a measurement unit (2) for measuring the X-ray diffraction intensity profile of a test sample (16); a distance measurement unit (9) for measuring the separation distance (Z) between the test sample (16) and the measurement unit (2); and a data processing unit (10) for correction processing of the X-ray diffraction intensity profile. The measurement unit (2) has an X-ray irradiation unit (3) for irradiating the test sample (16) with X-rays, an X-ray detection unit (6) for one-dimensional detection or two-dimensional detection of multiple refracted X-rays from the test sample (16), and a chassis (8) in which the X-ray irradiation unit (3) and the X-ray detection unit (6) are fixedly arranged relative to a reference plane (17). The data processing unit (10) calculates displacement (delta Z) of the test sample (16) on the basis of the separation distance (Z); in accordance with the calculated displacement (delta Z), calculates the true X-ray diffraction angle (2theta) at the measurement point on the test sample (16); and corrects the X-ray diffraction intensity profile on the basis of the calculated true X-ray diffraction angle (2theta).

Description

technical field [0001] The present invention relates to an X-ray diffraction device and an X-ray diffraction measurement method for measuring the X-ray diffraction intensity distribution of a substance constituting a test sample. Background technique [0002] The X-ray diffraction method can obtain the crystal structure, amount, lattice spacing, deformation, stress, crystallization, etc. Various useful information such as orientation and crystallinity. Therefore, the X-ray diffraction method is widely used in various fields to evaluate the properties of the test sample when various treatments are performed. [0003] Generally speaking, the X-ray diffraction measurement of the test sample using the X-ray diffraction method is to extract a part of the product such as steel strip after manufacture or in the manufacturing process as the test sample, and use the extracted test sample It is done outside the production line, ie off-line. However, when the X-ray diffraction measu...

AI Technical Summary

Problems solved by technology

However, when the X-ray diffraction measurement of the test sample is performed offline, it is difficult to immediately reflect the obtained X-ray diffraction measurement results on the manufacturing conditions to control the manufacturing conditions of the products in the manufacturing process.

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