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a vacuum furnace

A technology of vacuum furnace and vacuum chamber, which is applied in the field of vacuum equipment and can solve problems such as low cooling efficiency

Inactive Publication Date: 2018-04-10
CHENGDU CVAC VACUUM TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The present invention provides a vacuum furnace to solve the technical problem of low cooling efficiency of the existing vacuum furnace

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Embodiment Construction

[0042] In order to enable those skilled in the technical field to which the application belongs to understand the application more clearly, the technical solutions of the application will be described in detail below through specific embodiments in conjunction with the accompanying drawings.

[0043] In an embodiment of the present invention, a vacuum furnace is provided. The main purpose of the vacuum furnace of the present invention is to quickly heat the workpiece 5 in a high vacuum state, perform vacuum degassing, vacuum annealing and other processes, and rapidly cool the workpiece 5 to normal temperature after the treatment is completed.

[0044] In order to save the space of the vacuum furnace, the vacuum furnace adopts a single vacuum structure, and the workpiece 5 is directly subjected to fast cooling and fast heat treatment in the vacuum chamber.

[0045] See below figure 1 , specifically introduce the structure of the vacuum furnace.

[0046] The vacuum furnace has...

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Abstract

The invention discloses a vacuum furnace. The vacuum furnace a vacuum chamber, wherein a groove type water jacket is arranged at the bottom of the vacuum chamber; an object carrying table used for placing a workpiece is arranged at the bottom of a groove of the groove type water jacket; heating components which are sequentially arranged on the groove side wall and the groove bottom of the groove type water jacket heat the workpiece; the groove type water jacket is used for cooling the heating components; an annular refrigeration part winding the workpiece is further arranged in the groove to cool the workpiece; and a plurality of exhaust holes are formed in the annular refrigeration part. According to the vacuum furnace, a first gas cooling device introduces a first cooling gas into the annular refrigeration part through a pipeline, and the first cooling gas is exhausted through the exhaust holes to cool the workpiece; and the gas input to the workpiece is a cooled gas, so that the cooling time is shorter than the cooling time of direct nitrogen output, and the cooling efficiency is higher.

Description

technical field [0001] The present application relates to a vacuum device, in particular to a vacuum furnace. Background technique [0002] With the continuous development of science and technology, vacuum technology has also developed rapidly, and there are more and more types of vacuum equipment, and people have also enjoyed various conveniences brought by vacuum technology. [0003] In the current vacuum furnace, if the workpiece is to be heated, the heating component is directly used to heat the workpiece in the vacuum chamber. And if the workpiece is to be cooled, nitrogen is fed into it to cool it, but the nitrogen cooling time is long, and the cooling efficiency is low, and it usually takes more than 10 hours to meet the requirements. Contents of the invention [0004] The invention provides a vacuum furnace to solve the technical problem of low cooling efficiency of the existing vacuum furnace. [0005] In order to solve the above technical problems, the inventio...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F27B5/05F27B5/06F27B5/14F27D9/00
CPCF27B5/04F27B5/06F27B5/14F27B2005/064F27D9/00F27D2009/0075
Inventor 向勇傅绍英杨小军
Owner CHENGDU CVAC VACUUM TECH CO LTD
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