Interference standard component error separation method based on least square rotation coupling
An error separation and least squares technology, applied in the field of surface shape detection of optical components, can solve problems such as error information, and achieve the effects of improving measurement accuracy, fast separation speed and high precision
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[0030] combine figure 1 and figure 2 , a method for separating errors of interference standard parts based on least squares rotation matching, the method steps are as follows:
[0031] Step 1. Construct a three-dimensional ray tracing simulation system for the zero-position interference test system of the telephoto lens based on vector optics theory, and input the parameters of the telephoto lens to the above-mentioned three-dimensional ray tracing simulation system;
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