A mask for evaporation and its manufacturing method

Abstract

The disclosure provides a mask plate for evaporation and a manufacturing method thereof. The mask for evaporation includes: a mask body with opposite first and second surfaces, the second surface is close to the evaporation source; and at least one row of evaporation holes arranged along the first direction, which runs through the mask body, Each evaporation hole includes a first opening, a second opening, a first lower side edge and a second lower side edge, the first opening is located on the first surface side of the mask body, and the second opening is located on the second surface of the mask body side, the first lower side edge and the second lower side edge are arranged opposite to each other along the first direction, and extend to the second opening, and the second lower side edge of each evaporation hole is closer to the mask plate than the first lower side edge In the central line of the main body, the included angle between the second lower edge of at least one evaporation hole and the first direction is smaller than the included angle between the first lower edge and the first direction.

Description

technical field [0001] The present disclosure relates to a mask, in particular to a mask for evaporation and a manufacturing method thereof. Background technique [0002] With the development of organic materials and preparation technology, products based on OLED technology have gradually appeared in the market in recent years. Because OLED has the characteristics of energy saving, environmental protection, large-area preparation, and good compatibility with flexible substrates, the industry predicts that AMOLED display will be the mainstream technology of the next generation of flat panel display. [0003] In the process of AMOLED preparation, the patterning of OLED light-emitting devices needs to be completed with a high-precision mask, and as the size of the AMOLED-manufactured substrate increases, the evaporation source often uses a linear evaporation component. Such as figure 1 As shown, the linear evaporation assembly 1 includes a plurality of linearly arranged nozzl...

AI Technical Summary

Problems solved by technology

The dotted lines L1, L2, L3 are the paths through which the evaporation material is deposited on the substrate 3 through the nozzles of the linear evaporation assembly. It can be seen that for the nozzle on the left, the evaporation material emitted through the dotted lines L1, L2 can be deposited on the substrate 2 on the preset position of the substrate 2, and the evaporated material emitted by the dotted line L3 cannot be deposited on the preset position of the substrate 2 because it is blocked by the bottom left of the opening 4, that is, the incident angles of the evaporated material on different positions of the substrate have different This will lead to different deposition effects corresponding to different openings on the substrate 3, resulting in poor uniformity of the coating film on the entire substrate, especially the sub-pixels P on the left and right sides of the substrate cannot achieve central symmetry, resulting in The shadow effect on both sides of the molded substrate is different, which affects the pass rate of the product, especially when producing high-pixel products.

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