Magnetic polydimethylsiloxane (PDMS) mask-based micro-pit array electrolytic machining system and method

A micro-pit array and mask technology, applied in electrochemical processing equipment, metal processing equipment, manufacturing tools, etc., can solve the problems of PDMS disturbance, weak adhesion, difficult to achieve, etc., to achieve stable PDMS properties and improve processing stability. Domain effect

Active Publication Date: 2016-11-02
NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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Problems solved by technology

However, PDMS is directly covered on the workpiece, and the adhesion to the workpiece is very weak without external force. The electrolyte flowing on the surface of the PDMS mask and in the micropores will disturb the PDMS, and the electrolysis products such as bubbles wil

Method used

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  • Magnetic polydimethylsiloxane (PDMS) mask-based micro-pit array electrolytic machining system and method
  • Magnetic polydimethylsiloxane (PDMS) mask-based micro-pit array electrolytic machining system and method
  • Magnetic polydimethylsiloxane (PDMS) mask-based micro-pit array electrolytic machining system and method

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[0019] In the following, the present invention will be described with reference to the accompanying drawings: a system and method for electrochemical processing of a micropit array based on a magnetic PDMS mask includes the following steps:

[0020] a. Make cathode tool 1 and clamp 5. The cathode tool 1 has a uniform group slit structure, the diameter of the liquid inlet of the clamp is 20mm, and two liquid outlets are set on the lower surface of the cathode tool, the diameter is 1mm;

[0021] b. Make a magnetic PDMS mask 2 with an array of through holes, such as Figure 5 ;

[0022] c. Stick the magnetic PDMS mask 2 on the upper surface of the anode workpiece 3, the permanent magnet 4 is close to the lower surface of the anode workpiece, and clamp the cathode tool 1 and the anode workpiece 3 together with the clamp 5, wherein the cathode tool 1 and the magnetic PDMS mask The distance of mold 2 is 15mm;

[0023] d. The anode workpiece 3 and the cathode tool 4 are respectively connect...

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Abstract

The invention relates to a magnetic polydimethylsiloxane (PDMS) mask-based micro-pit array electrolytic machining system and method and belongs to the field of micro-electrolytic machining. The system comprises a cathode tool (1), a PDMS mask, an anode workpiece (3), a clamp (5), an electrolyte (6) and a power supply (7) and is characterized in that the PDMS mask is a magnetic PDMS mask (2), and a permanent magnet (4) for attracting the magnetic PDMS mask (2) to enabling the magnetic PDMS mask (2) to be closely attached to the surface of the anode workpiece (3) is further arranged below the anode workpiece (3). The system and the method are adopted for electrolytic machining, the magnetic PDMS mask can be closely attached to the surface of the anode workpiece under the action of a magnetic field, and the electrolytic machining locality of a micro-pit array is improved.

Description

technical field [0001] The invention relates to a system and method for micropit array electrolytic machining based on a magnetic PDMS mask, belonging to the field of micro electrolytic machining. Background technique [0002] Polydimethylsiloxane (PDMS) is a kind of silicone material, usually it is mixed and polymerized by PDMS prepolymer and curing agent according to a certain volume ratio (mass ratio). Dimethylsiloxane in liquid state is a viscous liquid, called silicone oil, which is a mixture of organosiloxanes with chain structures of different degrees of polymerization. Solid PDMS is a kind of silicone elastomer, which is non-toxic, hydrophobic sexual characteristics. PDMS has good replication and chemical stability, insulation, and corrosion resistance, and is suitable for processing various biochemical reaction chips. It is widely used in technologies such as microcontact imprinting, microfluidic patterning, and template-assisted patterning in MEMS. [0003] In mi...

Claims

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Application Information

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IPC IPC(8): B23H3/00B23H9/00
CPCB23H3/00B23H9/00
Inventor 侯志保曲宁松陈晓磊
Owner NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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