Electrochemical machining system

A technology of electrochemical processing and electrodes, which is applied in the direction of electrochemical processing equipment, electric processing equipment, processing special circuits, etc., can solve problems such as low precision, lagging development, and failure to meet precision processing requirements, and meet high-precision processing requirements and improve The effect of adjusting precision

Active Publication Date: 2016-11-09
SUZHOU UNIV
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Problems solved by technology

[0015] The development of existing electrochemical micro-nano processing equipment is relatively lagging behind, the structure of

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  • Electrochemical machining system
  • Electrochemical machining system
  • Electrochemical machining system

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Embodiment Construction

[0041] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0042] see figure 1 and figure 2 An electrochemical machining system according to a preferred embodiment of the present invention includes a base 10 , an electrolytic cell 20 and a processing electrode 30 facing the electrolytic cell 20 , and the processing electrode 30 is used to process workpieces in the electrolytic cell 20 . Electrochemical machining is mainly through anodic dissolution or cathodic deposition, so that the workpiece is dissolved or deposited in the electrolyte to achieve the purpose of processing. The electrochemical machining system of the present invention is used for precise machining of workpieces. In order to achieve precision, the present inven...

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Abstract

The invention relates to an electrochemical machining system. The system comprises a base, an electrolytic bath and a machining electrode facing the electrolytic bath, wherein an X-direction movement platform driving the electrolytic bath to move in the X direction, a Y-direction movement platform driving the electrolytic bath to move in the Y direction and a Z-direction movement platform driving the machining electrode to move in the Z direction are arranged on the base; the Z-direction movement platform is connected with micro motion platforms driving the machining electrode to perform micro motion in three degrees of freedom, the micro motion platforms comprise an X-direction micro motion platform connected with the Z-direction movement platform, a Y-direction micro motion platform connected with the X-direction micro motion platform and a Z-direction micro motion platform connected with the Y-direction micro motion platform; a force sensor for detecting pressure applied to the electrolytic bath by the machining electrode is further connected to the electrolytic bath; a displacement sensor for detecting a machining depth of a workpiece is further connected to the machining electrode.

Description

technical field [0001] The invention relates to a nanometer processing device, in particular to an electrochemical processing system. Background technique [0002] With the rapid development of science and technology, miniaturization is the general development trend in the field of military and civilian research. For example, the development of large-scale integrated circuits (ULSI), micro-nano electromechanical systems (MEMS&NEMS), micro-total analysis systems (μ-TAS) and precision optical devices requires the size of each functional device to reach the micro-nanometer level. Modern high-tech warfare requires the miniaturization of weapons, such as miniature submarines, miniature aircraft, and miniature missiles. The components of these new weapons require their structural dimensions to reach the order of microns or even nanometers, and the processing precision to reach the order of nanometers. In the civilian field, taking computer CPU chips as an example, the characteris...

Claims

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Application Information

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IPC IPC(8): B23H3/00B23H3/02B23H11/00
CPCB23H3/00B23H3/02B23H11/00
Inventor 钟博文
Owner SUZHOU UNIV
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