SPR phase measurement method for measuring thickness of nano-scale double-layer metal film

Abstract

The invention discloses an SPR phase measurement method for measuring the thickness of a nano-scale double-layer metal film. The method comprises steps: a theoretical curve diagram for a phase change difference between TM polarized waves and TE polarized waves for the metal film layer thickness along with an incident angle change is built; a group of incident angle values with an SPR resonance angle as the center change is set; an interference fringe pattern for a prism-type SPR sensor coating region is acquired; an interference fringe pattern for a prism-type SPR sensor non coating region is acquired; a phase change difference between TM polarized waves and TE polarized waves in a coating region is calculated and obtained; the incident angle is changed sequentially starting from an initial angle, and a measurement curve diagram for the phase change difference along with the incident angle change is obtained; and according to the theoretical curve for the phase change difference along with the incident angle change and the obtained measurement curve, the thickness of the double-layer metal film coating the SPR sensor is determined. The method of the invention has the advantages of simple structure, high measurement precision and convenient operation.

Description

technical field [0001] The invention relates to a method for measuring the thickness of a metal thin film, in particular to an SPR phase measurement method for measuring the thickness of a nanoscale double-layer metal thin film. Background technique [0002] With the wide application of thin film technology in the fields of microelectronics, optoelectronics, aerospace, bioengineering, weaponry, food science, medical equipment and polymer materials, thin film technology has become a research hotspot in the field of current scientific and technological research and industrial production. In particular, the rapid development of nanoscale thin film technology has directly affected the development direction of science and technology and people's way of life. The continuous improvement and rapid development of thin-film manufacturing technology also put forward higher requirements for various parameters of the thin film, such as the thickness and refractive index parameters of the...

AI Technical Summary

Problems solved by technology

For example, the Chinese patent application number is 201310137996.6, which discloses a SPR phase measurement method for measuring the thickness of nanoscale metal films. The coating structure of the SPR sensor in this method is mainly a single-layer structure, but the limitation of the application of the single-layer structure lies in the The measurement sensitivity of the SPR sensor composed of it is not high enough and the adhesion of some metal materials is not good

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