SPR phase measurement method for measuring thickness of nano-scale double-layer metal film
A technology of double-layer metal and thin film thickness, applied in measurement devices, optical devices, instruments, etc., can solve the problems of poor adhesion of metal materials and insufficient measurement sensitivity of SPR sensors, and achieve simple structure, easy operation, high The effect of precision measurement
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[0023] The present invention will be further described in detail below in conjunction with the drawings and specific embodiments:
[0024] Surface Plasmon Resonance (SPR) effect is a special physical optical phenomenon. The evanescent wave generated when the light wave is totally reflected on the interface between the medium and the metal can cause the collective oscillation of free electrons on the metal surface to form a Surface Plasmon Wave (SPW) whose magnetic field vector direction is parallel At the interface between the medium and the metal, the magnetic field strength reaches the maximum at the interface and shows an exponential decay trend in the two media. When the wave vector of the incident light is equal to the wave vector of the surface plasmon, the SPR effect can be excited. At present, the modulation types of SPR sensing technology mainly include angle type, spectrum type and phase type. Among them, phase type SPR sensing technology has higher sensitivity and has ...
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