Scanning vibrating mirror vibration parameter measurement system and measurement method

Abstract

The invention relates to a scanning vibrating mirror vibration parameter measurement system and measurement method, and aims at solving the problems in the prior art that the angle measurement range is small, the frequency response is low and the precision is low. The measurement system comprises an integrating sphere light source, a first off-axis parabolic mirror, a second off-axis parabolic mirror, a single point detector, a signal acquisition unit and timing equipment. The light outlet of the integrating sphere light source is provided with a sinusoidal grating. The first off-axis parabolic mirror is arranged on the emergent light path of the integrating sphere light source. The second off-axis parabolic mirror is arranged on the emergent light path of the first off-axis parabolic mirror is arranged. A scanning vibrating mirror to be measured is arranged on the emergent light path of the second off-axis parabolic mirror. The single point detector is arranged at the convergent point of the reflecting beam of the scanning vibrating mirror to be measured so as to receive sinusoidal grating images. The timing equipment is used for synchronizing signal acquisition time of the motor of the scanning vibrating mirror to be measured and the single point detector and giving the corresponding time of each angular position of the scanning vibrating mirror to be measured. The signal acquisition unit is used for reading the output signals of the single point detector.

Description

technical field [0001] The invention belongs to the field of photoelectric measurement, and relates to a measurement system and a measurement method for vibration parameters of a scanning vibrating mirror. Background technique [0002] The scanning galvanometer is referred to as the galvanometer, which is mainly composed of a control motor and a mirror. The control motor drives the mirror to reciprocate at high speed around its rotating shaft. Galvanometers are widely used in laser processing and medical fields to control the laser action time to achieve controllable laser energy. Recently, the galvanometer is also used to compensate the image motion of the imaging camera due to the scene or its own motion, so that the imaging camera can obtain an imaging effect equivalent to staring during the motion. The inaccuracy of the vibration angular velocity of the galvanometer will lead to blurred imaging, which will greatly affect the imaging effect of the camera. [0003] Vibra...

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Problems solved by technology

[0004] The measurement of the vibration parameters of the existing galvanometer is mostly based on a high-precision tracking system to achieve non-contact measurement, but the angle measurement range of the system is not large, and the frequency response is low; while other measurement systems based on the principle of precision angle measurement, although The measurement speed is fast, the precision is high, and the ability to resist environmental interference is strong, but it is usually necessary to install auxiliary devices on the galvanometer, and the intervention of the auxiliary device will affect the dynamic performance of the galvanometer itself

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