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A method and system for predicting thermodynamic properties of surfactants

A surfactant and thermodynamic technology, applied in the field of predicting the thermodynamic properties of surfactants, can solve the problems of reducing the development cycle of CA and the long cycle of thermodynamic properties, and achieve the effect of reducing development costs and rapid prediction.

Active Publication Date: 2019-12-10
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The present invention provides a method and system for predicting the thermodynamic properties of surfactants. By establishing a homogeneous and heterogeneous PRISM theoretical model, the problem of a long period of predicting the thermodynamic properties of CA in the prior art is solved, and the development cycle of CA is reduced. Purpose

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  • A method and system for predicting thermodynamic properties of surfactants
  • A method and system for predicting thermodynamic properties of surfactants
  • A method and system for predicting thermodynamic properties of surfactants

Examples

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Embodiment 1

[0054] In order to better understand the technical solutions and technical effects of the present invention, specific embodiments will be described in detail below in conjunction with schematic flow charts. like figure 1 Shown, the inventive method comprises the following steps:

[0055] Step S01, determine the molecular configuration of the polymer surfactant, and determine the action point according to the molecular configuration.

[0056] In the embodiment of the present invention, the configuration of the surfactant molecule may be a semi-free chain. Generally, the polymer CA used in the CMP system can be simplified as a chain polymer, and the common polymer chains include free linkage chains, semi-free chains, and rotational isomer chains. Semi-free chains have high simulation accuracy in the process of describing real polymer systems. Therefore, in this embodiment, semi-free chains are mainly used as the analysis object, and each atom in the molecule is used as the int...

Embodiment 2

[0120] Different from Example 1, the action points of the PRISM theory in Example 2 are atomic groups divided according to certain rules, which makes the polymer configuration model more streamlined, and according to the action points, by constructing the PRISM theoretical model, high The thermodynamic properties of molecular CA further reduce the amount of calculation in the simulation process and shorten the development cycle of polymer CA. In this embodiment, only the different parts from the first embodiment are described, and the same parts are only briefly explained.

[0121] In order to better understand the technical solutions and technical effects of the present invention, specific embodiments will be described in detail below in conjunction with schematic flow charts. like figure 1 Shown, the inventive method comprises the following steps:

[0122] Step S11, determining the molecular configuration of the polymer surfactant, and determining the action point accordin...

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Abstract

The invention discloses a method and system for predicting the thermodynamic property of a surfactant. The method comprises following steps: determining the molecular configuration of the surfactant and determining action points according to the molecular configuration; obtaining intramolecular related functions according to the geometry information of the surfactant molecule; establishing a homogeneous phase and a heterogeneous phase PRISM theoretical models according to the closed equation based on the action points and the intramolecular related functions, and obtaining intermolecular related functions of homogeneous phase and a heterogeneous phase macromolecule surfactant according to the models; predicting the thermodynamic property of the current surfactant according to the intermolecular related functions of homogeneous phase and a heterogeneous phase macromolecule surfactant; according to the thermodynamic property of the current surfactant, assisting the development of grinding lubricant macromolecule surfactant. The method provides a theoretical approach to assist the development of new grinding lubricant macromolecule surfactant and methods, which can meet the requirements of predicting the thermodynamic properties of macromolecule surfactants in practical applications.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a method and system for predicting thermodynamic properties of surfactants. Background technique [0002] Surfactant (abbreviated as CA) refers to a substance that can significantly change the interface state of its solution system by adding a small amount. During the chemical mechanical planarization (CMP) process of integrated circuits, the grinding effect causes a large number of particles of different types and sizes to be adsorbed on the surface of the wafer and cannot be removed. As an essential component of the polishing liquid, CA can reduce the surface tension between the polishing liquid and the hydrophobic film, make the polishing liquid and the hydrophobic film more tightly bonded, reduce and control the residues and abrasive particles on the surface of the hydrophobic film of the wafer and other defects , can improve the effect of chemical mechanical grind...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G06F17/50
Inventor 徐勤志陈岚
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI