Thin film getter activating in low temperature of uncooled focal plane detector and preparation method thereof

Abstract

The invention relates to a thin film getter activating in low temperature of an uncooled focal plane detector and a preparation method thereof and the thin film getter activating in low temperature has the performance of low-temperature activation and high gas absorbing. The getter comprises an adjustable layer and an air sucking layer, wherein the adjustable layer is deposited on a window opening of the uncooled focal plane detector and the air sucking layer is deposited on the adjustable layer. The adjustable layer is made of anyone of the following metal comprising Ti, Zr, AL, Cr, Cu, Fe, Pt or Ru, and the sucking layer is made of multi-component alloy comprising the two materials of Zr and Co and at least one of the materials of Y, La and Ce. An extremely tight transition layer is formed between the adjustable layer and the window opening, the thickness of the transition layer is 20-50 nm, the thickness of the adjustable layer is 1-2 [mu]m, and the thickness of the sucking layer is 2-5 [mu]m. The thin film getter of a porous structure is adopted, the transition layer is relatively-extremely tight, and is relatively matched with infrared window metal work functions, so that the adhesive force of the thin film getter on a substrate is reinforced.

Description

technical field

[0001] The invention relates to an uncooled focal plane detector, in particular to a low-temperature activated thin-film getter for an uncooled focal plane detector with low-temperature activation and high gas-absorbing performance and a preparation method thereof. Background technique

[0002] The performance of the uncooled focal plane detector needs to be maintained in a high vacuum environment, and the components of the detector are degassed due to the outgassing of the internal materials, resulting in a decrease in vacuum. In order to achieve the purpose of maintaining the vacuum quality and ideal working environment inside the uncooled focal plane detector assembly, a getter will be added inside the detector, and the getter will be used to absorb the gas generated inside the detector. Currently, the commonly used getter materials are: Columnar getters and flake getters, but both are large in size and high in cost. During use, particles are prone to drop...