Six-degree-of-freedom active-passive combined positioning and vibration-isolating platform

Abstract

The invention discloses a six-degree-of-freedom active-passive combined positioning and vibration-isolating platform. The platform comprises a foundation platform (3) and a load platform (1), and is characterized in that the platform further comprises six actuator units (2) connected with the load platform (1) through upper flexible hinges (213) and connected with the foundation platform (3) though lower flexible hinges (201); and the axes of the actuator units are perpendicular to one another, and each actuator unit comprises a primary passive vibration-isolating mechanism and a secondary vibration-isolating mechanism. According to the six-degree-of-freedom active-passive combined positioning and vibration-isolating platform, the six actuator units are of a cube structure in the space, actuators have the same structural characteristics and control characteristics, accurate six-degrees-of-freedom positioning and vibration-isolating can be achieved, and the six-degree-of-freedom active-passive combined positioning and vibration-isolating platform can be widely applied to the fields of aerospace, optical instruments and meters, precision manufacturing and measuring, and the like.

Description

technical field [0001] The invention belongs to the field of precision positioning and vibration isolation, and more specifically relates to a six-degree-of-freedom active-passive composite positioning and vibration isolation platform. Background technique [0002] Vibration interference in the working environment is a key factor affecting equipment processing and measurement accuracy. With the improvement of equipment processing and measurement accuracy requirements, strict requirements are put forward for vibration isolation and platform positioning accuracy to ensure that precision equipment can work normally. Vibration isolation can be divided into passive vibration isolation, active vibration isolation and active-passive integrated vibration isolation. The traditional passive vibration isolator is composed of mass-spring-damping elements to achieve the effect of reducing vibration. Its structure is simple, easy to implement, reliable in operation, and does not require a...

AI Technical Summary

Problems solved by technology

[0006] Patent document CN103438142B is a six-degree-of-freedom active vibration isolation device, which uses six voice coil motors as active actuators and air springs as passive vibration-isolation units to effectively isolate vibration energy exceeding the natural frequency, and can realize six-degree-of-freedom Accurate positioning, but the air spring needs to be inflated and deflated by the external environment during the working process, which limits its working environment and needs further improvement

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