Double-side grinding and polishing machine

Abstract

The invention discloses a double-side grinding and polishing machine. The double-side grinding and polishing machine comprises an upper disc. A lower disc (1) is arranged under the upper disc. The upper disc and the lower disc (1) are driven by different motors and are opposite in rotation direction. An inner gear ring (2) is arranged at the outer edge side of the lower disc (1), and a sun gear (3) is arranged in the middle of the lower disc (1). Planet gears (4) serving as tools and clamps are placed on the lower disc (1). The two sides of each planet gear (4) are engaged with the inner gear ring (2) and the sun gear (3) correspondingly; and the inner gear ring (2) and the sun gear (3) are driven by different motors, and therefore the planet gears (4) can rotate and can also revolve around the sun gear (3) under the action of the inner gear ring (2) and the sun gear (3). By means of the double-side grinding and polishing machine, workpieces can form grinding motion with the speeds coordinated with one another in three or more directions in a carrier; the two sides are ground uniformly; resistance is small; efficiency is high; the workpieces are not damaged; and the double-side grinding and polishing machine is applicable to grinding and polishing of silicon wafers, sapphire substrates and epitaxial wafers.

Description

technical field [0001] The invention relates to the field of optical technology, in particular to a double-sided grinding and polishing machine capable of grinding and polishing workpieces on both sides. Background technique [0002] In the existing processing of optical workpieces, a single-sided grinding and polishing machine is generally used. Whether it is a grinding process or a polishing process, one side of the optical workpiece must be processed first and then the other side, which is time-consuming and laborious and the production cost is high. Contents of the invention [0003] The purpose of the present invention is to provide a double-sided grinding and polishing machine capable of grinding and polishing workpieces on both sides to solve the problems in the prior art. [0004] The purpose of the present invention is solved by the following technical solutions: [0005] A double-sided grinding and polishing machine, including an upper plate, characterized in th...

AI Technical Summary

Problems solved by technology

[0002] In the existing optical workpiece processing, a single-sided grinding and polishing machine is generally used. Whether it is a grinding process or a polishing process, one side of the optical workpiece must be processed first and then the other side, which is time-consuming and labor-intensive and the production cost is high.

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