Microparticle detector and manufacturing method of screening element
A particle and detector technology, applied in the field of particle detectors, can solve the problems of high price, inability to real-time monitoring, large size of the filter, etc., and achieve the effect of reducing the price
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[0072]see Figure 1A It is a schematic cross-sectional view of the first embodiment of the particle detector of the present invention, the particle detector 10 of the present invention includes a screening element 12 and a detection element 14, the screening element 12 has a plurality of holes 16, and the detection element 14 Correspondingly disposed under the screening element 12 , the detection element 14 has a detection area 142 for detecting at least one particle concentration. In one embodiment, the hole 16 is straight cylindrical, and the hole 16 is a through silicon via (TSV). In one embodiment, the detection element 14 and the screening element 12 are bonded or sealed with an adhesive material 18 near the edge.
[0073] see Figure 1B It is a schematic cross-sectional view of the second embodiment of the particle detector of the present invention. The structure of the present invention is basically as described in the first embodiment, except that all or part of the h...
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