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Microparticle detector and manufacturing method of screening element

A particle and detector technology, applied in the field of particle detectors, can solve the problems of high price, inability to real-time monitoring, large size of the filter, etc., and achieve the effect of reducing the price

Active Publication Date: 2019-09-10
IND TECH RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

These filters are bulky, not easily portable, cannot be monitored in real time, and are expensive

Method used

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  • Microparticle detector and manufacturing method of screening element
  • Microparticle detector and manufacturing method of screening element
  • Microparticle detector and manufacturing method of screening element

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Embodiment Construction

[0072]see Figure 1A It is a schematic cross-sectional view of the first embodiment of the particle detector of the present invention, the particle detector 10 of the present invention includes a screening element 12 and a detection element 14, the screening element 12 has a plurality of holes 16, and the detection element 14 Correspondingly disposed under the screening element 12 , the detection element 14 has a detection area 142 for detecting at least one particle concentration. In one embodiment, the hole 16 is straight cylindrical, and the hole 16 is a through silicon via (TSV). In one embodiment, the detection element 14 and the screening element 12 are bonded or sealed with an adhesive material 18 near the edge.

[0073] see Figure 1B It is a schematic cross-sectional view of the second embodiment of the particle detector of the present invention. The structure of the present invention is basically as described in the first embodiment, except that all or part of the h...

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Abstract

The invention discloses a method for manufacturing a particle detector and a screening element. The microparticle detector includes a screening element with a plurality of holes; and a detection element correspondingly arranged below the screening element, the detection element has a detection area for detecting at least one microparticle concentration. The invention also includes a method for manufacturing the screening element.

Description

technical field [0001] The invention relates to a particle detector, in particular to a particle detector suitable for miniaturization. Background technique [0002] According to the estimation of the World Health Organization, in 2020, the death rate of lung cancer in the world will climb to the fifth place. Lung cancer is currently discovered through X-ray machine examinations, but the time of discovery is usually at the end stage. In addition to smoking, the cause of lung cancer is airborne particle (Particulate Matter) pollution. [0003] Traditional instruments for monitoring the concentration of suspended particles are bulky. For example, the weighing and measuring machine collects suspended particles in the air continuously for 24 hours, collects them on filter paper, and weighs the particles to convert the weight value into a concentration value. [0004] Cyclone particle filter is another type of particle filter that uses a fixed air flow rate to filter out partic...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N15/06
CPCG01N15/0618G01N15/0656G01N1/2205G01N5/02G01N15/0272G01N15/0606G01N2015/0046
Inventor 江家雯柯正达林一信张香鈜陈文志
Owner IND TECH RES INST