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A micro-nano preparation method of a high-precision microlens array structure

A micro-lens array, high-precision technology, used in lenses, instruments, optics, etc., can solve the problems of large processing size, long processing cycle, tool wear, etc., and achieve the effect of high processing precision, low processing cost, and efficient processing.

Active Publication Date: 2018-09-21
BEIHANG UNIV
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Problems solved by technology

At present, the microlens structure processing technology based on laser technology is mainly used for processing glass substrates, silicon substrates and other materials, and the processing size is large; the ultra-precision machining process has a long processing cycle, low precision, large processing size, and easy Defects such as tool wear and damage occur

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  • A micro-nano preparation method of a high-precision microlens array structure

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Embodiment Construction

[0029] The specific implementation of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0030] figure 1 It is a diagram of the ultrasonic vibration polishing process device involved in the present invention, wherein the transducer 2 is clamped by the fixed bracket 1, and the fixed bracket 1 is tightened and fixed by the clamp 9, and the clamp 9 is fixed on the surface of the supporting device 8, and the transducer 2 The lower end vibrates along the longitudinal direction 3 at ultrasonic frequency, and drives the diamond suspension 5 in the container 4 to vibrate rapidly, and the particles in the diamond suspension 5 impact the upper surface of the cemented carbide mold 6 at a very fast speed to polish the cemented carbide The upper surface of the mold 6 has a microlens array structure processed by a femtosecond laser, and the hard metal mold 6 is supported by a supporting structure 7 .

[0031] A micro-nano prepar...

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Abstract

A micro-nano preparation method of a high-precision micro lens array structure of the invention comprises the following steps: S1, choosing a mold material; S2, grinding and finely polishing the surface of the mold material; S3, designing a micro lens array structure scheme to be machined; S4, determining femtosecond laser machining parameters; S5, putting the mold material on a femtosecond laser precision motion platform, and machining a micro lens array structure on the surface of the material according to the designed array structure and laser parameters; S6, putting the mold material after femtosecond laser machining in diamond suspension, and using an ultrasonic vibration polishing device to perform vibration polishing; and S7, putting the mold material after ultrasonic vibration polishing in anhydrous ethanol or aqueous solution for ultrasonic cleaning, thus obtaining a high-precision micro lens array structure on the surface of the mold. The machining method has the remarkable advantages of short machining cycle, high precision, low cost, smooth surface of the machined structure, and the like. Moreover, there is no tool wear in the machining process.

Description

technical field [0001] The invention relates to a micro-nano preparation method of a high-precision microlens array structure, and belongs to the technical fields of ultrashort pulse laser processing micro-nano structures and ultrasonic vibration polishing. Background technique [0002] Microlens array is an optical microstructure, which has the advantages of small structural unit, high integration, and good optical performance. It can meet the higher performance requirements of optical components put forward by the development of modern science and technology. Optical zone communication, three-dimensional imaging and other fields have wide applications. For example, in 2014, Liu Zhihui et al. designed a multi-order phase diffractive microlens array structure to solve problems such as homogenization of area array semiconductor laser beams. The technology of replicating the microlens structure on the mold surface is an important processing method to realize mass processing of...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B3/00
CPCG02B3/0025
Inventor 管迎春王海鹏
Owner BEIHANG UNIV
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