Graphical substrate for LED chip and preparation method of graphical substrate

Abstract

The invention discloses a graphical substrate for an LED chip and a preparation method of the graphical substrate, and relates to the technical field of semiconductor packaging. In order to effectively utilize light emitted from the end surface of an epitaxial layer of the LED chip, the invention provides the graphical substrate used for the LED chip. The graphical substrate comprises a groove structure which is used for changing the propagation direction of the light emitted from the end surface of the LED chip at a short distance, so that the light loss is reduced and the light-extraction efficiency of the LED chip is greatly improved. Meanwhile, the thickness of the substrate is reduced, the serial thermal resistance of a system is reduced; the volume of a packaging module can be greatly reduced; and integrated application is facilitated. In addition, the invention provides the preparation method of the graphical substrate. The substrate is corroded through a wet process to obtain the graphical substrate with the groove structure.

Description

Technical field [0001] The invention relates to the field of semiconductor packaging, in particular to a patterned substrate of an LED chip and a preparation method thereof. Background technique [0002] Since the 1990s, LEDs have attracted widespread attention and have developed rapidly. For example, GaN-based LEDs have wavelengths covering green and ultraviolet wavelengths, and have significant advantages such as low energy consumption, long life, and fast response time. Visible light communication, polymer curing, sterilization and disinfection have huge market value or potential application value. [0003] LEDs usually epitaxial semiconductor layers such as n-type layer, light-emitting area (ie active area) and p-type layer on a homogeneous or heterogeneous substrate in sequence. These semiconductor layers have a high refractive index. For example, the refractive index of GaN material in the visible light band is 2.3-2.4, which is far from the refractive index of air (n=1). T...

AI Technical Summary

Problems solved by technology

Whether it is a bracket or a substrate, its configuration is generally a planar structure, which causes the part of the light emitted from the end surface of the epitaxial layer of the LED chip to be easily absorbed by the electrodes on the substrate, packaging materials or brackets, which is not conducive to the maximum light extraction efficiency. The substrate of the LED chip is thicker, which also makes the system larger, which is not conducive to integrated applications

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